Scanning Probe Microscopy

This article describes new perspectives on SPM-related science and technology, based on systems and control theory. These perspectives have led to a better understanding of SPM technology, overcome hurdles that limited the efficacy of SPM, and resulted in new modes of SPM-based interrogation. ThNcAFM, based on systems principles, has made it possible to image with resolution as high as 0.25 Aring in ambient conditions. The orders-of-magnitude improvements achieved in areas such as precision positioning, sample imaging, and sample detection rates emphasize the potential of systems tools in nanotechnology. The concept of using models in online operation has significant potential for SPM. For instance, TF-AFM, which uses models for online operation, resolves competing objectives of high resolution and detection rate by using a design from a systems perspective that makes detection bandwidth independent of the quality factor of the probe and, therefore, independent of resolution. The systems perspective also facilitates the interpretation of data since it provides a precise means for delineating the effects of the inherent dynamics of the interrogation system from the properties of the sample being probed. Devices such as SPMs are sensitive to operating conditions, ambient conditions, and modeling inaccuracies. Modern control theory provides a framework where such challenges can be effectively addressed. This aspect translates to reliable experiments in terms of repeatability, which is crucial in many nanoscience studies.

[1]  K. El Rifai,et al.  On dual actuation in atomic force microscopes , 2004, Proceedings of the 2004 American Control Conference.

[2]  S. Jarvis,et al.  Direct mechanical measurement of interatomic potentials , 1996, Nature.

[3]  Hendrik Hölscher,et al.  Calculation of the frequency shift in dynamic force microscopy , 1999 .

[4]  F. Allgöwer,et al.  A new control strategy for high-speed atomic force microscopy , 2003 .

[5]  D. Sarid.  Scanning Force Microscopy: With Applications To Electric, Magnetic, And Atomic Forces , 1991 .

[6]  Heinrich Rohrer,et al.  7 × 7 Reconstruction on Si(111) Resolved in Real Space , 1983 .

[7]  C. Gerber,et al.  Surface Studies by Scanning Tunneling Microscopy , 1982 .

[8]  E. McFarland,et al.  Multi-mode noise analysis of cantilevers for scanning probe microscopy , 1997 .

[9]  Murti V. Salapaka,et al.  Construction and Experimental Implementation of a Model-Based Inverse Filter to Attenuate Hysteresis in Ferroelectric Transducers , 2006, IEEE Transactions on Control Systems Technology.

[10]  Guifu Ding,et al.  Microfabricated Quill-Type Surface Patterning Tools for the Creation of Biological Micro/Nano Arrays , 2004, Biomedical microdevices.

[11]  Srinivasa M. Salapaka,et al.  Sample-profile estimate for fast atomic force microscopy , 2005 .

[12]  Arvind Raman,et al.  Chaos in atomic force microscopy. , 2006, Physical review letters.

[13]  Ping Ge,et al.  Tracking control of a piezoceramic actuator , 1996, IEEE Trans. Control. Syst. Technol..

[14]  Srinivasa M. Salapaka,et al.  A robust control based solution to the sample‐profile estimation problem in fast atomic force microscopy , 2005 .

[15]  Sergey Edward Lyshevski,et al.  There's Plenty of Room at the Bottom: An Invitation to Enter a New Field of Physics , 2007 .

[16]  W. Häberle,et al.  The "millipede" - nanotechnology entering data storage , 2002 .

[17]  V. Pisarenko.  The Retrieval of Harmonics from a Covariance Function , 1973 .

[18]  Srinivasa M. Salapaka,et al.  Making high resolution positioning independent of scan rates: A feedback approach , 2007 .

[19]  Murti V. Salapaka,et al.  Model Development for Atomic Force Microscope Stage Mechanisms , 2006, SIAM J. Appl. Math..

[20]  S. O. Reza Moheimani,et al.  High-Performance Control of Piezoelectric Tube Scanners , 2007, IEEE Transactions on Control Systems Technology.

[21]  G. Binnig,et al.  Tunneling through a controllable vacuum gap , 1982 .

[22]  F. Allgower,et al.  Robust 2 DOF-control of a piezoelectric tube scanner for high speed atomic force microscopy , 2003, Proceedings of the 2003 American Control Conference, 2003..

[23]  Bielefeldt,et al.  Subatomic Features on the Silicon (111)-(7x7) Surface Observed by Atomic Force Microscopy. , 2000, Science.

[24]  A. Sebastian,et al.  The amplitude phase dynamics and fixed points in tapping-mode atomic force microscopy , 2004, Proceedings of the 2004 American Control Conference.

[25]  Toyoaki Eguchi,et al.  High resolution atomic force microscopic imaging of the Si(111)-(7 x 7) surface: contribution of short-range force to the images. , 2002, Physical review letters.

[26]  D. Croft,et al.  Creep, hysteresis, and vibration compensation for piezoactuators: atomic force microscopy application , 2000, Proceedings of the 2000 American Control Conference. ACC (IEEE Cat. No.00CH36334).

[27]  Ahmet Oral,et al.  Nanomechanics Using an Ultra-Small Amplitude AFM , 2000 .

[28]  Franz J. Giessibl,et al.  Principle of NC-AFM , 2002 .

[29]  R. Erlandsson,et al.  Force interaction in low-amplitude ac-mode atomic force microscopy:. cantilever simulations and comparison with data from Si(111)7×7 , 1998 .

[30]  I. Mezić,et al.  On the Dynamics of a Harmonic Oscillator Undergoing Impacts with a Vibrating Platform , 2001 .

[31]  Mark A. Lantz,et al.  Off resonance ac mode force spectroscopy and imaging with an atomic force microscope , 1999 .

[32]  J B Pethica,et al.  Energy dissipation in atomic force microscopy and atomic loss processes. , 2001, Physical review letters.

[33]  Murti V. Salapaka,et al.  Piezoelectric scanners for atomic force microscopes: design of lateral sensors, identification and control , 1999, Proceedings of the 1999 American Control Conference (Cat. No. 99CH36251).

[34]  Murti V. Salapaka,et al.  Robust control approach to atomic force microscopy , 2003, 42nd IEEE International Conference on Decision and Control (IEEE Cat. No.03CH37475).

[35]  F. Allgöwer,et al.  High performance feedback for fast scanning atomic force microscopes , 2001 .

[36]  Srinivasa M. Salapaka,et al.  Design methodologies for robust nano-positioning , 2005, IEEE Transactions on Control Systems Technology.

[37]  Ahmet Oral,et al.  Quantitative atom-resolved force gradient imaging using noncontact atomic force microscopy , 2001 .

[38]  Keith Glover,et al.  A loop-shaping design procedure using H/sub infinity / synthesis , 1992 .

[39]  Murti V. Salapaka,et al.  Harmonic and power balance tools for tapping-mode atomic force microscope , 2001 .

[40]  Srinivasa M. Salapaka,et al.  Robust MIMO control of a parallel kinematics nano-positioner for high resolution high bandwidth tracking and repetitive tasks , 2007, 2007 46th IEEE Conference on Decision and Control.

[41]  Murti V. Salapaka,et al.  Harnessing the transient signals in atomic force microscopy , 2005 .

[42]  Andrew E. Pelling,et al.  Local Nanomechanical Motion of the Cell Wall of Saccharomyces cerevisiae , 2004, Science.

[43]  Murti V. Salapaka,et al.  Transient-signal-based sample-detection in atomic force microscopy , 2003 .

[44]  Murti V. Salapaka,et al.  High bandwidth nano-positioner: A robust control approach , 2002 .