论文信息 - Paper No 19.3: Back‐Channel‐Etch Process Flow for a‐IGZO TFTs - 字舞流文

Paper No 19.3: Back‐Channel‐Etch Process Flow for a‐IGZO TFTs

A. Chasin | G. Groeseneken | P. Heremans | D. Cheyns | S. Steudel | K. Myny | Jan Genoe | J. V. D. Steen | M. Nag | S. Smout | M. Ameys | S. Schols | P. Vicca | M. Willegems | A. Bhoolokam | M. Rockelé | K. Tempelaars