Detector array system on a single silicon chip: uniformity correction

This paper presents work done using a detector array integrated on a single silicon chip and shows its physical characteristics and performance. The emphasis here is on array uniformity and the accurate measure of incident intensities. All arrays suffer non-uniformity to some extent due to manufacturing tolerances. The influence of this on measured data is considered and two approaches to correction are presented: (1) It is shown that spectra built up by measurement of single events can yield accurate peak intensities and positions. (2) Where spectra are measured in the normal way by summing many events before readout (higher dynamic range) a correction for non-uniformity is desirable. A new correction algorithm is illustrated.