论文信息 - Fabrication and characterization of micro-heaters with low-power consumption using SOI membrane and trench structures

Fabrication and characterization of micro-heaters with low-power consumption using SOI membrane and trench structures

Abstract This paper presents the optimized design, fabrication and thermal characteristics of micro-heaters for thermal microelectromechanical system (MEMS) applications using Si-on-insulator (SOI) membrane and trench structures. The micro-heaters are based on a thermal measurement principle and contain thermal isolation regions of 10 μm thick Si membranes consisting of oxide-filled trenches in the SOI membrane rim. The micro-heaters were fabricated with Pt-RTD on the same substrate via the MgO buffer layer between the Pt thin-film and SiO2 layer. The thermal characteristics of micro-heaters with trench-free SOI membrane structure was 280 °C at an input power 0.9 W; and in the presence of 10 trenches, it was 580 °C due to the reduction of the external thermal loss. Therefore, a micro-heater with trenches in the SOI membrane rim structure provides a powerful and versatile alternative technology for enhancing the performance of micro-thermal sensors and actuators.

Gwiy-Sang Chung | G. Chung

[1] Ernst Obermeier,et al. A Microsensor With Integrated Heat Sink And Flow Guide For Gas Flow Sensing Applications , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

[2] Andreas Hierlemann,et al. Integrated array sensor for detecting organic solvents , 1995 .

[3] M. Parameswaran,et al. Micromachined thermal radiation emitter from a commercial CMOS process , 1991, IEEE Electron Device Letters.

[4] Haroon Ahmed,et al. Applications of thermal silicon sensors on membranes , 1995 .

[5] Gregory T. A. Kovacs,et al. Diode-based thermal r.m.s. converter with on-chip circuitry fabricated using CMOS technology , 1996 .

[6] Euisik Yoon,et al. An integrated mass flow sensor with on-chip CMOS interface circuitry , 1992 .

[7] U. Dibbern,et al. A substrate for thin-film gas sensors in microelectronic technology , 1990 .

[8] Pasqualina M. Sarro,et al. Sensor technology strategy in silicon , 1992 .

[9] C. Scheibe,et al. Basic Micro Module For Chemical Sensors With On Chip Heater And Buried Sensor Structure , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.