SiGe HBT technology with fT/fmax of 300GHz/500GHz and 2.0 ps CML gate delay

A SiGe HBT technology featuring fT/fmax/BVCEO=300GHz/500GHz/1.6V and a minimum CML ring oscillator gate delay of 2.0 ps is presented. The speed-improvement compared to our previous SiGe HBT generations originates from lateral device scaling, a reduced thermal budget, and changes of the emitter and base composition, of the salicide resistance as well as of the low-doped collector formation.

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