Writing nanometer-scale symbols in gold using the scanning tunneling microscope

The conditions required to electroetch nanometer‐sized craters in flat gold substrates with a scanning tunneling microscope operating in air are identified. Reproducible nanometer‐scale modifications of the substrate are possible. Letters and complex symbols with linewidths as small as 2 nm have been written. Experiments show that a good tunneling tip is not destroyed by the writing process.

[1]  P. Hansma,et al.  Scanning tunneling microscopy and lithography of solid surfaces covered with nonpolar liquids , 1987 .

[2]  James D. Cobine,et al.  Analysis of Electrode Phenomena in the High-Current Arc , 1955 .

[3]  D. P. Kern,et al.  Direct deposition of 10‐nm metallic features with the scanning tunneling microscope , 1988 .

[4]  Paul K. Hansma,et al.  Tunneling microscopy, lithography, and surface diffusion on an easily prepared, atomically flat gold surface , 1988 .

[5]  R. Pease,et al.  Exposure of calcium fluoride resist with the scanning tunneling microscope , 1987 .

[6]  Urs Staufer,et al.  Nanometer scale structure fabrication with the scanning tunneling microscope , 1987 .

[7]  E. W. Plummer,et al.  Field Emission Energy Distribution (FEED) , 1973 .

[8]  Harald Fuchs,et al.  Scanning tunneling microscope combined with a scanning electron microscope , 1986 .

[9]  G. Binnig,et al.  Scanning tunneling microscopy-from birth to adolescence , 1987 .

[10]  Jaklevic,et al.  Scanning-tunneling-microscope observation of surface diffusion on an atomic scale: Au on Au(111). , 1988, Physical review letters.

[11]  Fernando Flores,et al.  Model Theory for Scanning Tunneling Microscopy: Application to Au(110) (1×2) , 1983 .

[12]  P. Hansma,et al.  Scanning tunneling microscopy and atomic force microscopy of the liquid–solid interface , 1988 .

[13]  R. Silver,et al.  Direct writing of submicron metallic features with a scanning tunneling microscope , 1987 .

[14]  John Clarke,et al.  Surface modification with the scanning tunneling microscope , 1986, IBM J. Res. Dev..

[15]  Roger Fabian W. Pease,et al.  Lithography with the scanning tunneling microscope , 1986 .