Distributed transmission line phase shifter using parallel-plate ferroelectric thin film varactors

A distributed transmission line phase shifter based on two series connected parallel-plate ferroelectric thin film varactors, which are integrated into single crystal (100) LaAlO"3 (LAO) wafer, is presented. The equivalent circuit model was simulated by the EM simulation software in an effort to optimize the design. A device with differential phase shifts of 150^o at 8GHz with a low bias voltage of 12V was realized.

[1]  J. Horwitz,et al.  Microwave properties of tetragonally distorted (Ba0.5Sr0.5)TiO3 thin films , 2000 .

[2]  M. Kwak,et al.  Microwave Properties of Mn Doped (Ba1 - x,Srx)TiO3Thin Films for Tunable Phase Shifter , 2004 .

[3]  Robert A. York,et al.  Distributed analog phase shifters with low insertion loss , 1999 .

[4]  C. Mueller,et al.  Ferroelectric Thin Films-Based Technology for Frequency- and Phase-Agile Microwave Communication Applications , 2002 .

[5]  D. Lippens,et al.  A 310/spl deg//3.6-dB K-band phaseshifter using paraelectric BST thin films , 2006, IEEE Microwave and Wireless Components Letters.

[6]  Gabriel M. Rebeiz,et al.  Distributed MEMS true-time delay phase shifters and wide-band switches , 1998 .

[7]  A. Grishin,et al.  Low-frequency and microwave performances of laser-ablated epitaxial Na0.5K0.5NbO3 films on high-resistivity SiO2/Si substrates , 2002 .

[8]  C. Ong,et al.  Planar tunable high-temperature superconductor microwave broadband phase shifter with patterned ferroelectric thin film , 2006 .

[9]  C. Ong,et al.  Ferroelectric BaxSr1−xTiO3 thin-film varactors with parallel plate and interdigital electrodes for microwave applications , 2008 .

[10]  A. Tagantsev,et al.  Ferroelectric Materials for Microwave Tunable Applications , 2003 .

[11]  S. Gevorgian,et al.  Ferroelectric thin films: Review of materials, properties, and applications , 2006 .

[12]  Orest Vendik,et al.  Ferroelectric Tuning of Planar and Bulk Microwave Devices , 1999 .

[13]  Michael J. Lancaster,et al.  Microwave properties of Ba0.5Sr0.5TiO3 thin film coplanar phase shifters , 2006 .

[14]  Andrei Vorobiev,et al.  Silicon substrate integrated high Q-factor parallel-plate ferroelectric varactors , 2003 .

[15]  Peng Wang,et al.  Characterization of microwave dielectric properties of ferroelectric parallel plate varactors , 2009 .

[16]  James S. Speck,et al.  Monolithic Ka-band phase shifter using voltage tunable BaSrTiO/sub 3/ parallel plate capacitors , 2000 .