Position control device of Digital Micro-mirror Device

The present invention relates to a position adjusting device of a digital micro mirror, and more particularly to a rotation control means which activates the rotation control the direction of digital micro-mirror to be coupled with the bottom and; is coupled to an upper portion of the rotation control means said digital micro leveling means for adjusting the mirror and the rotation control means before and after, or left and right direction; support frame a plurality of combining the frames formed by being attached to the floor or equipment upper horizontal portion, on which the leveling means fixed; By done jidoe, between the rotation control means and the digital micro-mirror and further the cooling means mounted to be able to cool the heat generated from the digital micro-mirror, wherein the rotation control means includes an upper and a fixed coupling of the cooling means including and inside the rotating operation rotating body and that the axis of rotation is attached to; the rotary case and mounted to the upper portion of the rotating body; control is mounted to one side of the rotary case rotation of the rotating shaft work rotation sphere; one of the rotary case mounted on the side of the rotation stopper to restrict the rotation adjustment work sphere; And provides a position control of a digital micro-mirror device, characterized in that made it includes. According to the invention, not only can simply through the leveling means and the rotation control means the position of the digital micro mirror is mounted on the exposure apparatus to control as it is possible to perform accurate exposure can reduce the time and money accordingly there is an effect.