Study of a Measurement System for Two-Dimensional Micro-Displacement

Micro-displacement measurement has already been applied in the accurate measurement field extensively and the key of it lies in the accurate localization and movement.The design of a measurement system based on strain gauge for two-dimensional micro-displacement is introduced.The components which include micro-displacement measurement sensor,circuits and software are represented.The experiment result shows that it can be utilized to measure two-dimensional micro-displacement on micron or nanometer level.