Langmuir-type evaporation of CdTe epilayers

Langmuir-type evaporation of (100) oriented epilayers has been investigated. An activation energy of 1.98+or-0.18 eV for both Cd and Te2 desorption has been determined. A quantitative analysis of the excess Cd desorption in the beginning of the CdTe evaporation from initially stoichiometric CdTe has been carried out yielding an upper limit for the Cd deficit in the epilayer of 2-5%.