Development of Spherical Ultrasonic Motor

Abstract We have successfully developed a new type of spherical motor with two degree of freedom by ultrasonic vibration; it has ϕ45 mm rotor; the maximum speed is 30 rpm; the maximum output torque reaches 0.7 kgf cm; the maximum positioning error is less than 0.3 mm. It has very small and simple structure and has good controllability. We can expect to apply this motor to robotic manipulator's joints, machine vision systems, assembling machines, laser cutting tools and many fields.