CMOS DNA Sensor Array With Integrated A/D Conversion Based on Label-Free Capacitance Measurement

This paper presents a fully electronic label-free DNA chip in 0.5-mum CMOS technology, with 5-V supply voltage, suitable for low-cost highly integrated applications. The chip features an array of 128 sensor sites with gold electrodes and integrated measurement, conditioning, multiplexing and analog-to-digital conversion circuitry. The circuits measure capacitance variations due to DNA hybridization on the gold electrodes which are bio-modified by covalently attaching probes of known sequence. Specificity, repeatability and parallel detection capability of the fabricated chip are successfully demonstrated

[1]  G. Johansson,et al.  A Feasibility Study of a Capacitive Biosensor for Direct Detection of DNA Hybridization , 1999 .

[2]  M. Goossens,et al.  An improved electronic microarray‐based diagnostic assay for identification of MEFV mutations , 2004, Human mutation.

[3]  J. DiGiovanni,et al.  Differential gene expression in epidermis of mice sensitive and resistant to phorbol ester skin tumor promotion , 2005, Molecular carcinogenesis.

[4]  H. Yowanto,et al.  Electronic detection of single-base mismatches in DNA with ferrocene-modified probes. , 2001, Journal of the American Chemical Society.

[5]  S. P. Fodor,et al.  Large-scale genotyping of complex DNA , 2003, Nature Biotechnology.

[6]  Yue Li,et al.  Cantilever-based biosensors in CMOS technology , 2005, Design, Automation and Test in Europe.

[7]  F. Uslu,et al.  Labelfree fully electronic nucleic acid detection system based on a field-effect transistor device. , 2004, Biosensors & bioelectronics.

[8]  L. Benini,et al.  Microelectrodes on a Silicon Chip for Label-Free Capacitive DNA Sensing , 2006, IEEE Sensors Journal.

[9]  C Guiducci,et al.  DNA detection by integrable electronics. , 2004, Biosensors & bioelectronics.

[10]  R. Thewes,et al.  Fully electronic DNA detection on a CMOS chip: device and process issues , 2002, Digest. International Electron Devices Meeting,.

[11]  Thomas Haneder,et al.  A digital CMOS DNA chip , 2005, 2005 IEEE International Symposium on Circuits and Systems.

[12]  P. Sorger,et al.  Electronic detection of DNA by its intrinsic molecular charge , 2002, Proceedings of the National Academy of Sciences of the United States of America.

[13]  E. Souteyrand,et al.  DIRECT DETECTION OF THE HYBRIDIZATION OF SYNTHETIC HOMO-OLIGOMER DNA SEQUENCES BY FIELD EFFECT , 1997 .

[14]  W. Fawcett,et al.  Impedance Spectroscopy of Self-Assembled Monolayers on Au(111): Evidence for Complex Double-Layer Structure in Aqueous NaClO4 at the Potential of Zero Charge , 1997 .

[15]  D. McCarthy,et al.  An active microelectronic transducer for enabling label-free miniaturized chemical sensors , 2000, International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138).

[16]  Christoph Hagleitner,et al.  Very high Q-factor in water achieved by monolithic, resonant cantilever sensor with fully integrated feedback , 2003, Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498).

[17]  W. Simburger,et al.  Biochemical sensors based on bulk acoustic wave resonators , 2003, IEEE International Electron Devices Meeting 2003.

[18]  R. Thewes,et al.  A fully electronic DNA sensor with 128 positions and in-pixel A/D conversion , 2004, IEEE Journal of Solid-State Circuits.

[19]  Vladimir Tvarozek,et al.  Optimization of capacitive affinity sensors: drift suppression and signal amplification , 1999 .

[20]  Wolfram Wersing,et al.  Novel integrated FBAR sensors: a universal technology platform for bio- and gas-detection , 2003, Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498).