MEMS: An Overview

Micro-Electro-Mechanical Systems, or MEMS, are integrated micro devices or systems combining electrical and mechanical components. They are fabricated using integrated circuit (IC) batch processing techniques and can range in size from micrometers to millimeters. These systems can sense, control and actuate on the micro scale and function individually or in arrays to generate effects on the macro scale. This report presents an overview of MEMS technology with a special emphasis on piezo MEMS.