Full Fabrication Simulation of 300mm Wafer Focused on AMHS (Automated Material Handling Systems)
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Youngshin Han | Sangwon Chae | Chilgee Lee | Dongsik Park | Chilgee Lee | Youngshin Han | Sangwon Chae | D. Park
[1] Lawrence M. Wein,et al. Scheduling semiconductor wafer fabrication , 1988 .
[2] Kevin Benner,et al. Book review: Object-Oriented Simulation with Hierarchical, Modular Models by Bernard P. Zeigler (Academic Press) , 1990, SGAR.
[3] Averill M. Law,et al. Simulation Modeling & Analysis , 1991 .
[4] Bernard P. Zeigler,et al. Object-Oriented Simulation with Hierarchical, Modular Models: Intelligent Agents and Endomorphic Systems , 1990 .
[5] Randall P. Sadowski,et al. Simulation with Arena , 1998 .
[6] Robert F. Pierret,et al. Semiconductor device fundamentals , 1996 .
[7] Gerald T. Mackulak,et al. A simulation-based experiment for comparing AMHS performance in a semiconductor fabrication facility , 2001 .