论文信息 - Si doped GaP layers grown on Si wafers by low temperature PE-ALD - 字舞流文

Si doped GaP layers grown on Si wafers by low temperature PE-ALD

E. Nikitina | A. Uvarov | J. Kleider | A. Baranov | I. Morozov | I. Mukhin | K. Zelentsov | A. Gudovskikh | D. Kudryashov | S. D. Gall | Alexandra Levtchenko | A. Bukatin