An efficient iterative algorithm for subaperture stitching interferometry for aspheric surface

The subaperture stitching testing method provides a cost-effective means for large field of view, high spatial resolution interferometer. Current approaches to subaperture stitching are mostly limited to plano optics, where only the piston and the tilts are considered. Another implied assumption is that pixels corresponding to the overlapping region between pairs of subapertures are exactly known and given by the nominal translation within a spatial tolerance. This is obviously impractical in the case of aspheric surface. We address the problem here and introduce a geometrical approach to formulate it mathematically. It is essentially a large-scale nonlinear optimization problem, which is very complicated and time-consuming to be solved by conventional method. By virtue of the alternating optimization technique and the successive linearization method, we present a novel iterative algorithm for subaperture stitching interferometry for aspheric surface. It differs from others in that the CAD model of the tested surface is used to determine the overlapping region precisely and efficiently. Subapertures are then simultaneously stitched by minimizing deviations among them, as well as deviations from the nominal surface. As a result, precise prior knowledge of the nulling and alignment motion, which is of six degrees of freedom, is no longer required. Numerical simulations are given to test the validity and computational efficiency of the proposed algorithm.

[1]  Zexiang Li,et al.  Geometric algorithms for workpiece localization , 1998, IEEE Trans. Robotics Autom..

[2]  Mingyi Chen,et al.  Multiaperture overlap-scanning technique for moire metrology , 1996, Optics & Photonics.

[3]  James C. Wyant,et al.  Subaperture test of a large flat or a fast aspheric surface. , 1981 .

[4]  Michael Bray Stitching interferometer for large plano optics using a standard interferometer , 1997, Optics & Photonics.

[5]  Osuk Y. Kwon,et al.  Full Aperture Testing With Subaperture Test Optics , 1983, Optics & Photonics.

[6]  Mingyi Chen,et al.  Multiaperture overlap-scanning technique for large-aperture test , 1992, Other Conferences.

[7]  G N Lawrence,et al.  Interferometric characterization of full spheres: data reduction techniques. , 1987, Applied optics.

[8]  G N Lawrence,et al.  Subaperture testing of aspheres with annular zones. , 1988, Applied optics.

[9]  Paul Dumas,et al.  An automated subaperture stitching interferometer workstation for spherical and aspherical surfaces , 2003, SPIE Optics + Photonics.

[10]  Shouhong Tang,et al.  Stitching: high-spatial-resolution microsurface measurements over large areas , 1998, Optics & Photonics.

[11]  Katsuyuki Okada,et al.  Measurement of large plane surface shapes by connecting small-aperture interferograms , 1994 .

[12]  Aric B. Shorey,et al.  1 FLEXIBLE POLISHING AND METROLOGY SOLUTIONS FOR FREE-FORM OPTICS , 2004 .

[13]  Yingjie Yu,et al.  Recent developments of multi-aperture overlap-scanning technique , 2003, SPIE Optics + Photonics.

[14]  Bozenko F. Oreb,et al.  Stitching interferometric measurement data for inspection of large optical components , 2002 .

[15]  Tilman W. Stuhlinger,et al.  Subaperture Optical Testing: Experimental Verification , 1986, Other Conferences.

[16]  Mingyi Chen,et al.  Transformation and connection of subapertures in the multiaperture overlap-scanning technique for large optics tests , 1993 .

[17]  James C. Wyant,et al.  Large Field of View, High Spatial Resolution, Surface Measurements , 1998 .