Deposition and characterization of multilayers on thin foil x-ray mirrors for high-throughput x-ray telescopes

W/Si and Co/C multilayers have been deposited on epoxy- replicated Au mirrors from the ASTRO-E telescope project, SPectrum Roentgen Gamma (SRG) flight mirrors, DURAN glass substrates and Si witness wafers. A characterization of the multilayers with both hard x-rays and soft x-rays is presented. The roughness value obtained from the Si wafers and the DURAN glass are in the range 3.0-4.2 angstrom and 4.4-4.6 angstrom, respectively. For the epoxy-replicated Au mirrors roughnesses of 5.0-5.8 angstrom are achieved, while the roughness of the SRG flight mirrors are in the range of 8.5-11.0 angstrom. This clearly indicates the effectiveness of the epoxy-replication process for the production of smooth substrates for multilayer deposition to be used in future x-ray telescopes.