60 GHz compact integrated cross-coupled SIR-MH bandpass filter on bulk CMOS

A new 60 GHz fourth-order cross-coupled bandpass filter using a step-impedance-resonator (SIR) miniaturised open-loop resonator and the miniaturised-hairpin (MH) resonator was designed and fabricated on 0.13 µm bulk CMOS. It has 8.5 GHz (58–66.5 GHz) bandwidth, 5.9 dB insertion loss, and better than 10 dB return loss over the whole passband, and exhibits high selectivity and a compact size of 714.9×484 µm (0.346 mm2). This filter is the first reported cross-coupled filter above 40 GHz on CMOS.