Scatterometry for optimization of injection molded nanostructures at the fabrication line
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T. Nielsen | J. Garnæs | Ilja Czolkos | J. Nygård | P. Hansen | S. Jensen | A. Johansson | J. S. Madsen | L. H. Thamdrup | L. Nakotte | A. Vogelsang | Lasse Højlund Thamdrup