Low-k dielectric materials
暂无分享,去创建一个
Karen Maex | Denis Shamiryan | Francesca Iacopi | F. Iacopi | K. Maex | D. Shamiryan | Thomas Abell | T. Abell
[1] Paul S. Ho,et al. Electromigration reliability of dual-damascene Cu/porous methylsilsesquioxane low k interconnects , 2003 .
[2] D. Avnir,et al. Recommendations for the characterization of porous solids (Technical Report) , 1994 .
[3] Huanting Wang,et al. Pure‐Silica Zeolite Low‐k Dielectric Thin Films , 2001 .
[4] Karen Maex,et al. Low dielectric constant materials for microelectronics , 2003 .
[5] A. Grill. Electrical and optical properties of diamond-like carbon , 1999 .