Solving partial differential equations on irregular domains with moving interfaces, with applications to superconformal electrodeposition in semiconductor manufacturing

[1]  R. LeVeque,et al.  A comparison of the extended finite element method with the immersed interface method for elliptic equations with discontinuous coefficients and singular sources , 2006 .

[2]  J. Sethian,et al.  A Fast Level Set Method for Propagating Interfaces , 1995 .

[3]  T. Aslam A partial differential equation approach to multidimensional extrapolation , 2004 .

[4]  Stanley Osher,et al.  A Hybrid Method for Moving Interface Problems with Application to the Hele-Shaw Flow , 1997 .

[5]  Huajian Gao,et al.  A Numerical Study of Electro-migration Voiding by Evolving Level Set Functions on a Fixed Cartesian Grid , 1999 .

[6]  James Demmel,et al.  A Supernodal Approach to Sparse Partial Pivoting , 1999, SIAM J. Matrix Anal. Appl..

[7]  G. M.,et al.  Partial Differential Equations I , 2023, Applied Mathematical Sciences.

[8]  William L. Briggs,et al.  A multigrid tutorial, Second Edition , 2000 .

[9]  G. Golub Matrix computations , 1983 .

[10]  J. Dendy Black box multigrid , 1982 .

[11]  J. Sethian,et al.  Fronts propagating with curvature-dependent speed: algorithms based on Hamilton-Jacobi formulations , 1988 .

[12]  Zhilin Li,et al.  The Immersed Interface/Multigrid Methods for Interface Problems , 2002, SIAM J. Sci. Comput..

[13]  Alex M. Andrew,et al.  Level Set Methods and Fast Marching Methods: Evolving Interfaces in Computational Geometry, Fluid Mechanics, Computer Vision, and Materials Science (2nd edition) , 2000 .

[14]  J. Bonevich,et al.  Superconformal Electrodeposition of Copper in 500–90 nm Features , 2000 .

[15]  James A. Sethian,et al.  Flow under Curvature: Singularity Formation, Minimal Surfaces, and Geodesics , 1993, Exp. Math..

[16]  James A. Sethian,et al.  The Fast Construction of Extension Velocities in Level Set Methods , 1999 .

[17]  Zhilin Li,et al.  The Immersed Interface Method: Numerical Solutions of PDEs Involving Interfaces and Irregular Domains (Frontiers in Applied Mathematics) , 2006 .

[18]  Ullrich Rüde Mathematical and Computational Techniques for Multilevel Adaptive Methods , 1987 .

[19]  John E. Bonevich,et al.  A Simple Equation for Predicting Superconformal Electrodeposition in Submicrometer Trenches , 2001 .

[20]  J. Sethian Curvature and the evolution of fronts , 1985 .

[21]  Hongkai Zhao,et al.  An Eulerian Formulation for Solving Partial Differential Equations Along a Moving Interface , 2003, J. Sci. Comput..

[22]  S. Osher,et al.  A Non-oscillatory Eulerian Approach to Interfaces in Multimaterial Flows (the Ghost Fluid Method) , 1999 .

[23]  T. Belytschko,et al.  MODELING HOLES AND INCLUSIONS BY LEVEL SETS IN THE EXTENDED FINITE-ELEMENT METHOD , 2001 .

[24]  J. Strikwerda Finite Difference Schemes and Partial Differential Equations , 1989 .

[25]  Y. Saad,et al.  GMRES: a generalized minimal residual algorithm for solving nonsymmetric linear systems , 1986 .

[26]  T. Moffat,et al.  Superconformal electrodeposition in submicron features. , 2001, Physical review letters.

[27]  Thomas P. Moffat,et al.  Modeling superconformal electrodeposition in trenches , 2002, ITherm 2002. Eighth Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (Cat. No.02CH37258).

[28]  A. Brandt,et al.  The Multi-Grid Method for the Diffusion Equation with Strongly Discontinuous Coefficients , 1981 .

[29]  William L. Briggs,et al.  A multigrid tutorial , 1987 .

[30]  Panayotis C. Andricacos,et al.  Damascene copper electroplating for chip interconnections , 1998, IBM J. Res. Dev..

[31]  G. G. Stokes "J." , 1890, The New Yale Book of Quotations.

[32]  James A. Sethian,et al.  Numerical Methods for Propagating Fronts , 1987 .

[33]  J. K. Hunter,et al.  Reactive autophobic spreading of drops , 2002 .

[34]  Julio Michael Stern,et al.  Generalized line criterion for Gauss-Seidel method , 2003 .

[35]  Kazufumi Ito,et al.  Maximum Principle Preserving Schemes for Interface Problems with Discontinuous Coefficients , 2001, SIAM J. Sci. Comput..

[36]  G. Golub,et al.  Gmres: a Generalized Minimum Residual Algorithm for Solving , 2022 .

[37]  Edward H. Twizell,et al.  Second-order,L0-stable methods for the heat equation with time-dependent boundary conditions , 1996, Adv. Comput. Math..

[38]  J. W. Thomas Numerical Partial Differential Equations: Finite Difference Methods , 1995 .

[39]  Zhilin Li The immersed interface method: a numerical approach for partial differential equations with interfaces , 1995 .

[40]  Marko Subasic,et al.  Level Set Methods and Fast Marching Methods , 2003 .

[41]  J. Sethian AN ANALYSIS OF FLAME PROPAGATION , 1982 .

[42]  R. LeVeque Finite Volume Methods for Hyperbolic Problems: Characteristics and Riemann Problems for Linear Hyperbolic Equations , 2002 .

[43]  Thomas P. Moffat,et al.  Modeling Superconformal Electrodeposition Using The Level Set Method , 2003 .

[44]  Yousef Saad,et al.  Iterative methods for sparse linear systems , 2003 .

[45]  H. Holden,et al.  Front Tracking for Hyperbolic Conservation Laws , 2002 .

[46]  S. McCormick,et al.  A multigrid tutorial (2nd ed.) , 2000 .

[47]  Ronald Fedkiw,et al.  The immersed interface method. Numerical solutions of PDEs involving interfaces and irregular domains , 2007, Math. Comput..

[48]  Peter McCorquodale,et al.  A Cartesian grid embedded boundary method for the heat equation on irregular domains , 2001 .

[49]  J A Sethian,et al.  A fast marching level set method for monotonically advancing fronts. , 1996, Proceedings of the National Academy of Sciences of the United States of America.

[50]  J. Sethian,et al.  Transport and diffusion of material quantities on propagating interfaces via level set methods , 2003 .

[51]  A. West Theory of filling of high-aspect ratio trenches and vias in presence of additives , 2000 .

[52]  R. LeVeque Numerical methods for conservation laws , 1990 .

[53]  P. Colella,et al.  A Cartesian Grid Embedded Boundary Method for Poisson's Equation on Irregular Domains , 1998 .

[54]  J. Strikwerda Finite Difference Schemes and Partial Differential Equations, Second Edition , 2004 .

[55]  Timothy A. Davis,et al.  Direct methods for sparse linear systems , 2006, Fundamentals of algorithms.