论文信息 - Improvement of the architecture for MEMS resonator quality factor measurement

Improvement of the architecture for MEMS resonator quality factor measurement

In this paper, the performance analysis of our previously proposed architecture for MEMS resonator quality factor measurement is carried out in taking into account the imperfection of each functional block of the architecture. This analysis puts in evidence the impact of the imperfection of each functional block on the measurement precision and predicts the attainable measurement precision of this architecture. In order to improve the performance, an improved architecture is proposed, with which the measurement precision can be improved at least a factor of 2.

Hervé Mathias | Ming Zhang | Nicolas Llaser

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