论文信息 - Thermal stability of a freestanding EUV filter under long-term vacuum annealing at 700–1000°C - 字舞流文

Thermal stability of a freestanding EUV filter under long-term vacuum annealing at 700–1000°C

V. I. Luchin | D. E. Pariev | S. A. Gusev | M. Drozdov | N. Salashchenko | N. Chkhalo | A. Pestov | E. Kluenkov | A. Lopatin | N. Tsybin | L. Shmaenok