Charged Particle Microscopy: Why Mass Matters

From the nearly mass-less electron to massive ions, charged particle microscopes have diversified over the last few decades. At present, a broad range of available charged particles with varying masses fulfill many applications: from imaging to analysis to nanofabrication.

[1]  H. Salemink,et al.  Sub-10-nm nanolithography with a scanning helium beam , 2009 .

[2]  Brendan Griffin,et al.  A model of secondary electron imaging in the helium ion scanning microscope. , 2009, Ultramicroscopy.

[3]  S. Schwarz.  Secondary Ion Mass Spectroscopy , 2001 .

[4]  J. Notte,et al.  Analysis and metrology with a focused helium ion beama) , 2010 .

[5]  J. Ziegler.  The stopping and range of ions in solids vol 1 : The stopping and ranges of ions in matter , 2013 .

[6]  P. Hadley,et al.  Electron Beam-Induced Current (EBIC) in solution-processed solar cells. , 2011, Scanning.

[7]  Henry I. Smith,et al.  Membrane folding by helium ion implantation for three-dimensional device fabrication , 2007 .

[8]  D. Joy,et al.  Is Microanalysis Possible in the Helium Ion Microscope? , 2011, Microscopy and Microanalysis.

[9]  The neon gas field ion source—a first characterization of neon nanomachining properties , 2011 .

[10]  Samuel M. Nicaise,et al.  Neon Ion Beam Lithography (NIBL). , 2011, Nano letters.

[11]  Richard H. Livengood,et al.  Subsurface damage from helium ions as a function of dose, beam energy, and dose rate , 2009 .

[12]  L. Reimer,et al.  Scanning Electron Microscopy , 1984 .

[13]  L. Reimer.  Scanning Electron Microscopy: Physics of Image Formation and Microanalysis , 1984 .

[14]  C. Hagen,et al.  Simulation of ion imaging: sputtering, contrast, noise. , 2011, Ultramicroscopy.

[15]  J. E. Barth,et al.  Addition of different contributions to the charged particle probe size , 1996 .

[16]  Bryan M. Cord,et al.  Limiting factors in sub- 10 nm scanning-electron-beam lithography , 2009 .

[17]  H. Mizuta,et al.  Focused helium ion beam milling and deposition , 2011 .

[18]  R. Hill,et al.  Scanning Helium Ion Microscopy , 2012 .