Vapor-phase synthesis of nanosize aluminum nitride particles using a two-stage transferred arc reactor

Nanosize aluminum nitride particles were synthesized from the vapor phase in a two-stage transferred-arc plasma reactor using NH 3 and Al vapor as reactants. The powders were quantitatively analyzed using X-ray diffraction analysis. Samples for which complete conversion was achieved were characterized by dynamic light scattering (particle size and size distribution), BET analysis for specific surface area, scanning electron microscope, atomic force microscope (morphology), X-ray diffraction (crystal structure and particle size), and Fourier transform infrared (chemical bonds). White aluminum nitride powder with spheroidal shape and with hexagonal crystal structure was produced. The mean particle size was approximately 20 nm. The specific surface area varied from 80 to 100 m 2 /g. FTIR analysis indicated the presence of O-H bonds.