Sputtered boron films on silicon surface barrier detectors

Abstract Neutron detectors have been prepared by sputtering 10B directly on to the sensitive surface of silicon surface barrier detectors using low energy argon ions. A description of the sputtering system is given and comparisons are made between the sputtered detectors and conventional BF3 counters. Sputtering rates of the order of 100 A/min for boron were achieved.