论文信息 - Analysis of Nano-scale Strain Near Shallow Trench Isolation Structures by Energy-filtered Convergent Beam Electron Diffraction - 字舞流文

Analysis of Nano-scale Strain Near Shallow Trench Isolation Structures by Energy-filtered Convergent Beam Electron Diffraction

J. Spence | H. He | C. Kisielowski | J. Ager | E. Weber | E. Stach | C. Nelson | P. Zhang | J. Mardinly | A. A. Istratov | O. Karpenko