Media protected surface micromachined leverage beam pressure sensor
暂无分享,去创建一个
[1] Jakob Janting,et al. Reliability of industrial packaging for microsystems , 1998 .
[2] W. Ko,et al. Development of a miniature pressure transducer for biomedical applications , 1979, IEEE Transactions on Electron Devices.
[3] Lennart Löfdahl,et al. Small piezoresistive silicon microphones specially designed for the characterization of turbulent gas flows , 1994 .
[4] R. Hooke,et al. Approximate Analysis of the Large Deflection Elastic Behaviour of Clamped, Uniformly Loaded, Rectangular Plates: , 1969 .
[5] K.D. Wise,et al. Scaling limits in batch-fabricated silicon pressure sensors , 1987, IEEE Transactions on Electron Devices.
[6] L. Tenerz,et al. A fiberoptic silicon pressure microsensor for measurements in coronary arteries , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.
[7] L. Tenerz,et al. The first surface micromachined pressure sensor for cardiovascular pressure measurements , 1998, Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176.
[8] A. Nakladal,et al. Influences of humidity and moisture on the long-term stability of piezoresistive pressure sensors , 1995 .
[9] Karsten Dyrbye,et al. Protective coatings in harsh environments , 1996 .
[10] Karsten Dyrbye,et al. Packaging of physical sensors for aggressive media applications , 1996 .
[11] Ira E. Baskett,et al. A vertically integrated media-isolated absolute pressure sensor , 1998 .
[12] Martin Hill,et al. Development and characterisation of a surface micromachined FET pressure sensor on a CMOS process , 1999 .
[13] Darko Belavic,et al. Silicon pressure sensors with a thick film periphery , 1998 .
[14] L. E. Gates,et al. Hermetic passivation of chip-on-board circuits , 1991, 1991 Proceedings 41st Electronic Components & Technology Conference.
[15] Khalil Najafi,et al. An ultraminiature CMOS pressure sensor for a multiplexed cardiovascular catheter , 1992 .
[16] Andreas Schroth,et al. Ambient humidity and moisture - a decisive failure source in piezoresistive sensors , 1995 .