Development of a Precise and High Response Pressure Regulator for Gases

The pressure regulator is a substantial element in a pneumatic system. In this paper, we propose a regulator that achieves precise pressure control with high a dynamic response using a pressure differentiator (PD sensor) which we have developed. The regulator consists of an isothermal chamber, a servo valve, a pressure sensor, a laminar flow meter, and the PD sensor. Slight changes of pressure in the chamber can be detected by the PD sensor and is fed back to the servo valve to maintain the pressure at a desired value. The effectiveness of the developed regulator was confirmed experimentally in comparison with commercially available pressure regulators.