Enhanced On-Wafer Time-Domain Waveform Measurement Through Removal of Interconnect Dispersion and

We measure output waveshape and rise time of two high-speed digital circuits on wafer using a 50-GHz prototype of a new instrument. The instrument uses vector error correction to deembed the component under test like a network analyzer, but reads out in the time domain after the fashion of an equivalent-time oscilloscope. With the calibration plane of the instrument set at the tips of the wafer probes, errors arising from dispersion in the con- nection hardware are removed. We show that the random jitter in the measurement system is removed without the convolution penalty usually incurred by averaging so that anomalies such as pattern-dependent jitter are exposed. The system rise time is 7 ps, compared to a system rise time of 12-13 ps for a conventional equivalent-time oscilloscope of the same bandwidth in the presence of wafer probes, bias networks, and cables.