Heterogeneously integrated silicon photonics for the mid-infrared and spectroscopic sensing.

Besides being the foundational material for microelectronics, crystalline silicon has long been used for the production of infrared lenses and mirrors. More recently, silicon has become the key material to achieve large-scale integration of photonic devices for on-chip optical interconnect and signal processing. For optics, silicon has significant advantages: it offers a very high refractive index and is highly transparent in the spectral range from 1.2 to 8 μm. To fully exploit silicon’s superior performance in a remarkably broad range and to enable new optoelectronic functionalities, here we describe a general method to integrate silicon photonic devices on arbitrary foreign substrates. In particular, we apply the technique to integrate silicon microring resonators on mid-infrared compatible substrates for operation in the mid-infrared. These high-performance mid-infrared optical resonators are utilized to demonstrate, for the first time, on-chip cavity-enhanced mid-infrared spectroscopic analysis of organic chemicals with a limit of detection of less than 0.1 ng.

[1]  K. Stephan,et al.  Microstrip circuit applications of high-Q open microwave resonators , 1988 .

[2]  Marko Loncar,et al.  Integrated high-quality factor silicon-on-sapphire ring resonators for the mid-infrared , 2013, 10th International Conference on Group IV Photonics.

[3]  Zeger Hens,et al.  An integrated optic ethanol vapor sensor based on a silicon-on-insulator microring resonator coated with a porous ZnO film. , 2010, Optics express.

[4]  Michal Lipson,et al.  On-chip spectrophotometry for bioanalysis using microring resonators , 2011, Biomedical optics express.

[5]  Y. Sun,et al.  SOD wafer technology , 2003 .

[6]  M. Lipson,et al.  Cavity-enhanced on-chip absorption spectroscopy using microring resonators. , 2008, Optics express.

[7]  P. M. Asbeck,et al.  Advanced thin-film silicon-on-sapphire technology: microwave circuit applications , 1998 .

[8]  Robert W. Bruce,et al.  Theory and design , 2012 .

[9]  Claire F. Gmachl,et al.  Mid-infrared quantum cascade lasers , 2012, Nature Photonics.

[10]  Weidong Zhou,et al.  Transfer-printed stacked nanomembrane lasers on silicon , 2012, Nature Photonics.

[11]  Michael Bass,et al.  Handbook of optics , 1995 .

[12]  Hongtao Lin,et al.  Double resonance 1-D glass-on-silicon photonic crystal cavities for single-molecule mid-infrared photothermal spectroscopy: Theory and design , 2012, The 9th International Conference on Group IV Photonics (GFP).

[13]  Dennis W Prather,et al.  Nanomembrane transfer process for intricate photonic device applications. , 2011, Optics letters.

[14]  Ray T. Chen,et al.  Transfer of micro and nano-photonic silicon nanomembrane waveguide devices on flexible substrates. , 2010, Optics express.

[15]  R. Soref.  Mid-infrared photonics in silicon and germanium , 2010 .

[16]  R. Loo,et al.  Germanium-on-Silicon Mid-Infrared Arrayed Waveguide Grating Multiplexers , 2013, IEEE Photonics Technology Letters.

[17]  Pallab Bhattacharya,et al.  Flexible photodetectors on plastic substrates by use of printing transferred single-crystal germanium membranes , 2009 .

[18]  Kathleen Richardson,et al.  Fabrication and testing of planar chalcogenide waveguide integrated microfluidic sensor. , 2007, Optics express.

[19]  A. Samoc,et al.  Dispersion of refractive properties of solvents: Chloroform, toluene, benzene, and carbon disulfide in ultraviolet, visible, and near-infrared , 2003 .

[20]  Pao Tai Lin,et al.  Chip-scale Mid-Infrared chemical sensors using air-clad pedestal silicon waveguides. , 2013, Lab on a chip.

[21]  Yonggang Huang,et al.  Transfer printing by kinetic control of adhesion to an elastomeric stamp , 2006 .

[22]  Boris Mizaikoff,et al.  Waveguide-enhanced mid-infrared chem/bio sensors. , 2013, Chemical Society reviews.

[23]  Max G. Lagally,et al.  Single-crystal silicon/silicon dioxide multilayer heterostructures based on nanomembrane transfer , 2007 .

[24]  Ciyuan Qiu,et al.  Suspended Si ring resonator for mid-IR application. , 2013, Optics letters.

[25]  M. Bruel.  Silicon on insulator material technology , 1995 .

[26]  Ke Xu,et al.  Mid-infrared Suspended Membrane Waveguide and Ring Resonator on Silicon-on-Insulator , 2012, IEEE Photonics Journal.

[27]  Yang Liu,et al.  Silicon waveguides and ring resonators at 5.5 µm , 2010 .

[28]  Yurii A. Vlasov,et al.  Silicon CMOS-integrated nano-photonics for computer and data communications beyond 100G , 2012, IEEE Communications Magazine.

[29]  Michael Jetter,et al.  Ultra-sensitive mid-infrared evanescent field sensors combining thin-film strip waveguides with quantum cascade lasers. , 2012, The Analyst.

[30]  Gunther Roelkens,et al.  Heterogeneous III-V/silicon photonic integrated circuits , 2013 .

[31]  R. Vijaya,et al.  Photonic crystal sensors: An overview , 2010 .

[32]  P. Mahadevan,et al.  An overview , 2007, Journal of Biosciences.

[33]  Graham T. Reed,et al.  Silicon Photonics: The State of the Art , 2008 .

[34]  Yonggang Huang,et al.  Printed Assemblies of Inorganic Light-Emitting Diodes for Deformable and Semitransparent Displays , 2009, Science.

[35]  M. Lipson,et al.  On-chip gas detection in silicon optical microcavities , 2008, 2008 Conference on Lasers and Electro-Optics and 2008 Conference on Quantum Electronics and Laser Science.

[36]  Ray T. Chen,et al.  On-chip methane sensing by near-IR absorption signatures in a photonic crystal slot waveguide. , 2011, Optics letters.

[37]  Richard A. Soref,et al.  Silicon waveguided components for the long-wave infrared regionThis article was submitted to the spe , 2006 .

[38]  Juejun Hu,et al.  Cavity-Enhanced IR Absorption in Planar Chalcogenide Glass Microdisk Resonators: Experiment and Analysis , 2009, Journal of Lightwave Technology.

[39]  Boris Mizaikoff,et al.  On-chip integrated mid-infrared GaAs/AlGaAs Mach-Zehnder interferometer. , 2013, Analytical chemistry.

[40]  Thomas Wriedt,et al.  Refractive-index measurements in the near-IR using an Abbe refractometer , 1997 .

[41]  Ray T. Chen,et al.  Stamp printing of silicon-nanomembrane-based photonic devices onto flexible substrates with a suspended configuration. , 2012, Optics letters.

[42]  Heung Cho Ko,et al.  Arrays of silicon micro/nanostructures formed in suspended configurations for deterministic assembly using flat and roller-type stamps. , 2011, Small.