Field Analysis and Control of Angle of a Magnetic Levitation Micromotion Stage

This paper analysis the characteristic why Halbach array field is an one side field and give the formulation from current to drive force. Modeling dynamic and designing the control system for the control of angle movement of magnetic levitation stage. Control the movement of angle with PID controller precise. Simulation result and precision analysis indicate this magnetic levitation micromotion stage has good dynamic characteristic of angle movement controlled and it can realize microscale resolution.