Yield improvement using statistical analysis of process dates

Rapid yield improvement is necessary in modern wafer fabrication facilities to ensure profitability of huge investments. Statistical analysis of data is a valuable method for improving yield. Usual methods like statistical process control (SPC), designs of experiments (DOE) and mapping analysis are necessary, but not sufficient because of process complexity. This paper presents a new statistical approach for solving yield issues when the root cause comes from a failure at a single process stage. The advantage of this approach is the only data required are the process dates of the lots at each process stage and the probe results. Three different methods have been tested to solve these issues. Only one of them is detailed in this paper. The efficiency of this method is demonstrated on two real yield issues where the defective stage is known.

[1]  B. Silverman,et al.  Nonparametric Regression and Generalized Linear Models: A roughness penalty approach , 1993 .

[2]  Adrian F. M. Smith,et al.  Sampling-Based Approaches to Calculating Marginal Densities , 1990 .

[3]  D.A. James,et al.  A mathematical model for defect impact based on in-line vs test data correlations , 1999, 10th Annual IEEE/SEMI. Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 99 Proceedings (Cat. No.99CH36295).

[4]  R. M. Gardner,et al.  Solving tough semiconductor manufacturing problems using data mining , 2000, 2000 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 2000 (Cat. No.00CH37072).

[5]  P. Green.  Reversible jump Markov chain Monte Carlo computation and Bayesian model determination , 1995 .

[6]  W. K. Hastings,et al.  Monte Carlo Sampling Methods Using Markov Chains and Their Applications , 1970 .

[7]  Allan Y. Wong.  A statistical approach to identify semiconductor process equipment related yield problems , 1997, 1997 IEEE International Symposium on Defect and Fault Tolerance in VLSI Systems.

[8]  Fourmun Lee.  Advanced yield enhancement: integrated yield analysis , 1997, 1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ASMC 97 Proceedings.

[9]  Leo Breiman,et al.  Classification and Regression Trees , 1984 .

[10]  F. Mieno,et al.  Yield improvement using data mining system , 1999, 1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat No.99CH36314).

[11]  J. Durham,et al.  A statistical method for correlating in-line defectivity to probe yield , 1997, 1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ASMC 97 Proceedings.

[12]  Adrian F. M. Smith,et al.  Automatic Bayesian curve fitting , 1998 .

[13]  Sylvia Richardson,et al.  Markov Chain Monte Carlo in Practice , 1997 .

[14]  N. Metropolis,et al.  Equation of State Calculations by Fast Computing Machines , 1953, Resonance.

[15]  P. Besse,et al.  Recherche d'une étape défaillante dans un procédé industriel : Quand le désordre est source d'information , 1999 .

[16]  A. Y. Wong.  A systematic approach to identify critical yield sensitive parametric parameters , 1997, 1997 2nd International Workshop on Statistical Metrology.

[17]  Hal S. Stern,et al.  Neural networks in applied statistics , 1996 .

[18]  Thomas P. Ryan,et al.  Statistical methods for quality improvement , 1989 .

[19]  E. A. Sack.  Global yield engineering for IC production , 1998 .

[20]  Kazunori Nemoto,et al.  A new systematic yield ramp methodology , 1999, 10th Annual IEEE/SEMI. Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 99 Proceedings (Cat. No.99CH36295).

[21]  Kamal Rajkanan.  Yield analysis methodology for low defectivity wafer fabs , 2000, Records of the IEEE International Workshop on Memory Technology, Design and Testing.

[22]  Ping Wang,et al.  Factory start-up and production ramp: yield improvement through signature analysis and visual/electrical correlation , 1995, Proceedings of SEMI Advanced Semiconductor Manufacturing Conference and Workshop.

[23]  David Jensen,et al.  Integrated yield management , 1999 .

[24]  Costas J. Spanos,et al.  Semiconductor yield improvement: results and best practices , 1995 .