Repeatability study of 2D MEMS mirrors based on S-shaped Al/SiO2 bimorphs

MEMS devices based on bimorphs are affected by several effects including creep, stress, and fracture in bimorph structures. In this paper, we present the reliability study of an S-shaped bimorph MEMS mirror. The following tests are performed: 100 million cycle scanning, vibration, and isothermal holding. Only 0.4% scan angle change was observed after experiencing a 6-axis, 20g vibration. A maximum 0.7% change was measured after the MEMS mirror gone through an isothermal holding for 10 hours at 150°C. After a 100 million cycles of scanning, the maximum drift was less than 0.01°.

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