Manufacturing and measurement of freeform optics

Abstract Freeform optics is the next-generation of modern optics, bringing advantages of excellent optical performance and system integration. It finds wide applications in various fields, such as new energy, illumination, aerospace and biomedical engineering. The manufacturing of freeform optics is an integrated technology involving optical design, machining, moulding, measurement and characterization. This paper surveys the current application status and research on major technologies in details.

[1]  Roger Haynes,et al.  Characterization of Lenslet Arrays for Astronomical Spectroscopy , 2001 .

[2]  G. Forbes,et al.  Shape specification for axially symmetric optical surfaces. , 2007, Optics express.

[3]  Fengzhou Fang,et al.  Nanometric cutting of single crystal silicon surfaces modified by ion implantation , 2011 .

[4]  Paul J. Scott,et al.  Freeform surface characterisation - a fresh strategy , 2007 .

[5]  K. Imanaka,et al.  Low-wavefront aberration and high-temperature stability molded micro Fresnel lens , 1989, IEEE Photonics Technology Letters.

[6]  Wei Zhou,et al.  A study on mechanism of nano-cutting single crystal silicon , 2007 .

[7]  Christopher J. Evans,et al.  “Structured”, “Textured” or “Engineered” Surfaces , 1999 .

[8]  Yazid E. Tohme Grinding aspheric and freeform micro-optical molds , 2007, SPIE MOEMS-MEMS.

[9]  K. Mizutani,et al.  A piezoelectric-drive table and its application to micro-grinding of ceramic materials , 1990 .

[10]  Vladimir Oliker Geometric and variational methods in optical design of reflecting surfaces with prescribed irradiance properties , 2005, SPIE Optics + Photonics.

[11]  C H Skinner,et al.  Charge-coupled-device detection of soft x rays for grazing-incidence spectrometers. , 1996, Applied optics.

[12]  G W Forbes Characterizing the shape of freeform optics. , 2012, Optics express.

[13]  A. Weckenmann,et al.  Application of modern high resolution tactile sensors for micro-objects , 2011 .

[14]  José Blen,et al.  High-efficiency free-form condenser overcoming rotational symmetry limitations. , 2008, Optics express.

[15]  H.-U. Danzebrink,et al.  Advances in Scanning Force Microscopy for Dimensional Metrology , 2006 .

[16]  Wei Gao,et al.  Surface profile measurement of a sinusoidal grid using an atomic force microscope on a diamond turning machine , 2007 .

[17]  Yoshimi Takeuchi,et al.  6-Axis control ultraprecision microgrooving on sculptured surfaces with non-rotational cutting tool , 2006 .

[18]  Bruce A. Richman,et al.  Optical Performance Comparison of Argon-Ion and Solid-State Cyan Lasers , 2003 .

[19]  Ilhan Kaya,et al.  Edge clustered fitting grids for φ-polynomial characterization of freeform optical surfaces. , 2011, Optics express.

[20]  A. Weckenmann,et al.  Prüfen von Werkstücken mit gekrümmten Flächen auf Koordinatenmeßgeräten / Testing of sculptured surfaces with coordinate measuring machines , 1987 .

[21]  Harvey M. Pollicove Survey Of Present Lens Molding Techniques , 1988, Photonics West - Lasers and Applications in Science and Engineering.

[22]  A. Weckenmann,et al.  Mathematische Beschreibung von gekrümmten Oberflächen für die Anwendung in der Koordinaten-Meßtechnik , 1983 .

[23]  Guofan Jin,et al.  Design of freeform mirrors in Czerny-Turner spectrometers to suppress astigmatism. , 2009, Applied optics.

[24]  Kari Pulli,et al.  Multiview registration for large data sets , 1999, Second International Conference on 3-D Digital Imaging and Modeling (Cat. No.PR00062).

[25]  Akira Yabe Representation of freeform surfaces suitable for optimization. , 2012, Applied optics.

[26]  Juan C. Minano,et al.  TIR-R concentrator: a new compact high-gain SMS design , 2001, SPIE Optics + Photonics.

[27]  Fei Chen,et al.  Angular color uniformity enhancement of white light-emitting diodes integrated with freeform lenses. , 2010, Optics letters.

[28]  P. Zamora,et al.  Advanced PV concentrators , 2009, 2009 34th IEEE Photovoltaic Specialists Conference (PVSC).

[29]  Scott Halle,et al.  Experimental result and simulation analysis for the use of pixelated illumination from source mask optimization for 22nm logic lithography process , 2009, Advanced Lithography.

[30]  Guipeng Tie,et al.  Tool decentration effect in slow tool servo diamond turning off-axis conic aspheric surface , 2010, International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT).

[31]  Takaaki Miyashita,et al.  Standardization for Microlenses and Microlens Arrays , 2007 .

[32]  Atsushi Okuyama,et al.  Off-axial HMD optical system consisting of aspherical surfaces without rotational symmetry , 1996, Electronic Imaging.

[33]  Harald Ries,et al.  Edge-ray principle of nonimaging optics , 1994 .

[34]  Xiangqian Jiang,et al.  Multisensor data fusion in dimensional metrology , 2009 .

[35]  Allen Y. Yi,et al.  Design and fabrication of a micro Alvarez lens array with a variable focal length , 2009 .

[36]  J M Gordon,et al.  Reflector design for illumination with extended sources: the basic solutions. , 1994, Applied optics.

[37]  John A. Rogers,et al.  Low-cost, low-loss microlens arrays fabricated by soft-lithography replication process , 2003 .

[38]  J. Rolland,et al.  Optimal local shape description for rotationally non-symmetric optical surface design and analysis. , 2008, Optics express.

[39]  David J. Whitehouse,et al.  Handbook of Surface Metrology , 2023 .

[40]  Ekkard Brinksmeier,et al.  Polishing of Structured Molds , 2004 .

[41]  Bernd Dörband,et al.  Interferometric testing of optical surfaces at its current limit , 2001 .

[42]  Hitoshi Ohmori,et al.  An Ultraprecision On-Machine Measurement System , 2005 .

[43]  A. Weckenmann,et al.  Probing Systems in Dimensional Metrology , 2004 .

[44]  Andreas Tünnermann,et al.  Thin wafer-level camera lenses inspired by insect compound eyes. , 2010, Optics express.

[45]  Han Huang,et al.  Machining of micro aspherical mould inserts , 2005 .

[46]  Vladimir Oliker,et al.  On the design of reflectors with prespecified distribution of virtual sources and intensities , 1998 .

[47]  Chinhua Wang,et al.  Design of a freeform varifocal panoramic optical system with specified annular center of field of view. , 2011, Optics express.

[48]  P. Scott,et al.  Freeform surface filtering using the diffusion equation , 2011, Proceedings of the Royal Society A: Mathematical, Physical and Engineering Sciences.

[49]  Chi Fai Cheung,et al.  Measurement and characterization of ultra-precision freeform surfaces using an intrinsic surface feature-based method , 2010 .

[50]  Tsunemoto Kuriyagawa,et al.  Effects of tool edge radius on ductile machining of silicon: an investigation by FEM , 2009 .

[51]  Martin G. Schinker,et al.  Turning Of Optical Glasses At Room Temperature , 1987, Other Conferences.

[52]  E. Brinksmeier,et al.  Tool path generation for ultra-precision machining of free-form surfaces , 2008, Prod. Eng..

[53]  Guo Li,et al.  Design and control of dual-stage feed drive system in ultra-precision machine tools , 2009 .

[54]  Yoshikazu Arai,et al.  Precision measurement of micro-lens profile by using a force-controlled diamond cutting tool on an ultra-precision lathe , 2011 .

[55]  Yongtian Wang,et al.  Design of an optical see-through head-mounted display with a low f-number and large field of view using a freeform prism. , 2009, Applied optics.

[56]  Anthony Beaucamp,et al.  New results extending the Precessions process to smoothing ground aspheres and producing freeform parts , 2005, SPIE Optics + Photonics.

[57]  David L. Trumper,et al.  Ultrafast Tool Servos for Diamond Turning , 2005 .

[58]  F. Fang,et al.  Periodic optical delay line based on a tilted parabolic generatrix helicoid reflective mirror. , 2009, Applied optics.

[59]  Lili Jiang,et al.  Slow slide servo turning of compound eye lens , 2013 .

[60]  Tino Hausotte,et al.  Enhanced measurement of high aspect ratio surfaces by applied sensor tilting , 2014 .

[61]  P. Benítez,et al.  RX: a nonimaging concentrator. , 1995, Applied optics.

[62]  Hiroto Suzuki,et al.  Shape error evaluation method of free-form surfaces , 1999, Comput. Aided Des..

[63]  Fengzhou Fang,et al.  Diamond Cutting of Silicon with Nanometric Finish , 1998 .

[64]  Ioan D. Marinescu,et al.  Electrolytic In-Process Dressing (ELID) Technologies : Fundamentals and Applications , 2011 .

[65]  F. Fang,et al.  Cylindrical coordinate machining of optical freeform surfaces. , 2008, Optics express.

[66]  Fengzhou Fang,et al.  Coordinate transformation machining of off-axis aspheric mirrors , 2013 .

[67]  Mourad Idir,et al.  Non-null full field X-ray mirror metrology using SCOTS: a reflection deflectometry approach. , 2012, Optics express.

[68]  A Weckenmann,et al.  Probing systems for dimensional micro- and nano-metrology , 2006 .

[69]  Norikazu Suzuki,et al.  Micro/nano sculpturing of hardened steel by controlling vibration amplitude in elliptical vibration cutting , 2011 .

[70]  K. Sawada,et al.  Manufacture of Multiple-focus Micro Fresnel Lenses by Means of Nonrotational Diamond Grooving , 2002 .

[71]  William Kordonski,et al.  Deterministic precision finishing of domes and conformal optics , 2005, SPIE Defense + Commercial Sensing.

[72]  Harald Ries,et al.  Designing tailored free-form surfaces for general illumination , 2003, SPIE Optics + Photonics.

[73]  Yoshitaka Morimoto,et al.  Development of Cutting Device with Enlargement Mechanism of Displacement , 2008 .

[74]  Ivan Moreno,et al.  Modeling the radiation pattern of LEDs. , 2008, Optics express.

[75]  A. Tünnermann,et al.  Freeform manufacturing of a microoptical lens array on a steep curved substrate by use of a voice coil fast tool servo. , 2011, Optics express.

[76]  W. Cathey,et al.  Extended depth of field through wave-front coding. , 1995, Applied optics.

[77]  Yazid Tohme Trends in Ultra Precision Machining of Freeform Optical Surfaces , 2008 .

[78]  Yury Gogotsi,et al.  Raman microspectroscopy study of processing-induced phase transformations and residual stress in silicon , 1999 .

[79]  Qiang Liu,et al.  A new hybrid macro- and micro-range fast tool servo , 2010, 2010 International Conference on Mechanic Automation and Control Engineering.

[80]  Paul J. Besl,et al.  A Method for Registration of 3-D Shapes , 1992, IEEE Trans. Pattern Anal. Mach. Intell..

[81]  D J Brady,et al.  Three-dimensional tomography using a cubic-phase plate extended depth-of-field system. , 1999, Optics letters.

[82]  Yi Luo,et al.  Design of compact and smooth free-form optical system with uniform illuminance for LED source. , 2010, Optics express.

[83]  Juan C. Miñano,et al.  New method of design of nonimaging concentrators. , 1992, Applied optics.

[84]  R. Komanduri,et al.  Molecular dynamics simulation of the nanometric cutting of silicon , 2001 .

[85]  Shangzhong Jin,et al.  Free-form microlens for illumination applications. , 2009, Applied optics.

[86]  R Andrew Hicks,et al.  Controlling a ray bundle with a free-form reflector. , 2008, Optics letters.

[87]  Yoshikazu Arai,et al.  Fabrication of Large-area Micro-lens Arrays with Fast Tool Control , 2008 .

[88]  Gary M. Bone,et al.  Design and control of a dual-stage feed drive , 2005 .

[89]  H Han Haitjema,et al.  Development of a Silicon-based Nanoprobe System for 3-D Measurements , 2001 .

[90]  R Winston,et al.  Tailored reflectors for illumination. , 1996, Applied optics.

[91]  Juan C. Miñano,et al.  The Future of Illumination Design , 2007 .

[92]  Feng Gao,et al.  Surface measurement errors using commercial scanning white light interferometers , 2007 .

[93]  R. Andrew Hicks,et al.  Direct methods for freeform surface design , 2007, SPIE Optical Engineering + Applications.

[94]  Thomas J. Suleski,et al.  Variable-diameter refractive beam shaping with freeform optical surfaces. , 2011, Optics letters.

[95]  Andreas Tünnermann,et al.  Micro Lens Array Milling on Large Wafers , 2009 .

[96]  S. Seeger,et al.  Feature Extraction and Registration – An Overview , 2002 .

[97]  Gregg E. Davis,et al.  Comparison of freeform manufacturing techniques in the production of monolithic lens arrays , 2009, Optical Engineering + Applications.

[98]  Fengzhou Fang,et al.  Modelling and experimental investigation on nanometric cutting of monocrystalline silicon , 2005 .

[99]  Leonid L. Doskolovich,et al.  A gradient method of designing optical elements for forming a specified irradiance on a curved surface , 2008 .

[100]  Harald Ries,et al.  Tailored freeform optical surfaces. , 2002, Journal of the Optical Society of America. A, Optics, image science, and vision.

[101]  Michael V. Swain,et al.  Microfracture about scratches in brittle solids , 1979, Proceedings of the Royal Society of London. A. Mathematical and Physical Sciences.

[102]  Lei Li,et al.  Design and fabrication of a freeform prism array for 3D microscopy. , 2010, Journal of the Optical Society of America. A, Optics, image science, and vision.

[103]  Tsunemoto Kuriyagawa,et al.  Study on Precision Grinding of Micro Aspherical Surface. Feasibility Study of Micro Aspherical Surface by Inclined Rotational Grinding. , 1998 .

[104]  Koichi Takahashi Development of ultrawide-angle compact camera using free-form optics , 2011 .

[105]  D. Lucca,et al.  Surfaces in Precision Engineering, Microengineering and Nanotechnology , 2003 .

[106]  Yuichi Okazaki,et al.  Precision nano-fabrication and evaluation of a large area sinusoidal grid surface for a surface encoder , 2003 .

[107]  Nicholas M. Patrikalakis,et al.  An algorithm for optimal free-form object matching , 2003, Comput. Aided Des..

[108]  Leonard Steinborn,et al.  International Organization for Standardization ISO/IEC 17025 General Requirements for the Competence of Testing and Calibration Laboratories , 2004 .

[109]  Jannick Rolland,et al.  Optimization of freeform lightpipes for light-emitting-diode projectors. , 2008, Applied optics.

[110]  Shinill Kang,et al.  Replication qualities and optical properties of UV-moulded microlens arrays , 2003 .

[111]  Liam Blunt,et al.  Paradigm shifts in surface metrology. Part I. Historical philosophy , 2007, Proceedings of the Royal Society A: Mathematical, Physical and Engineering Sciences.

[112]  N. Taniguchi Current Status in, and Future Trends of, Ultraprecision Machining and Ultrafine Materials Processing , 1983 .

[113]  Fei Chen,et al.  Design of compact freeform lens for application specific Light-Emitting Diode packaging. , 2010, Optics express.

[114]  Francesco Marinello,et al.  Increase of maximum detectable slope with optical profilers, through controlled tilting and image processing , 2007 .

[115]  Enrico Savio,et al.  Feature-oriented measurement strategy in atomic force microscopy , 2007 .

[116]  Yung-Tien Liu,et al.  Precision positioning device using the combined piezo-VCM actuator with frictional constraint , 2010 .

[117]  Hisayoshi Sato,et al.  Contribution of CIRP to the Development of Metrology and Surface Quality Evaluation during the last fifty years , 2001 .

[118]  P.H.J. Schellekens,et al.  Study of a Small-sized Ultrasonic Probe , 2006 .

[119]  Chunning Huang Investigation of Injection Molding Process for High Precision Polymer Lens Manufacturing , 2008 .

[120]  Allen Y Yi,et al.  Design and fabrication of a freeform phase plate for high-order ocular aberration correction. , 2005, Applied optics.

[121]  Julio Chaves,et al.  SMS design method in 3D geometry: examples and applications , 2004, SPIE Optics + Photonics.

[122]  Thomas A. Dow,et al.  Design tools for freeform optics , 2005, SPIE Optics + Photonics.

[123]  Nicholas M. Patrikalakis,et al.  Shape Intrinsic Properties for Free-Form Object Matching , 2003, Journal of Computing and Information Science in Engineering.

[124]  Suet To,et al.  A novel robust Gaussian filtering method for the characterization of surface generation in ultra-precision machining , 2006 .

[125]  Fengzhou Fang,et al.  An experimental study of micromachining step-mirrors for laser-diode beam shaping , 2006 .

[126]  P. Benítez,et al.  A high-gain, compact, nonimaging concentrator: RXI. , 1995, Applied optics.

[127]  J. Rolland,et al.  Design Methodology for High Brightness Projectors , 2008, Journal of Display Technology.

[128]  Enrico Savio,et al.  Fast technique for AFM vertical drift compensation , 2007 .

[129]  Michael B. North-Morris,et al.  Pixelated Phase-Mask Dynamic Interferometers , 2004 .

[130]  P. Nussbaum,et al.  Design, fabrication and testing of microlens arrays for sensors and microsystems , 1997 .

[131]  Chi Fai Cheung,et al.  An investigation into surface generation in ultra-precision raster milling , 2009 .

[132]  Wei Gao,et al.  Improvement of a Fast Tool Control unit for cutting force measurement in diamond turning of micro-lens array , 2009 .

[133]  Enrico Savio,et al.  Metrology of freeform shaped parts , 2007 .

[134]  Zexin Feng,et al.  Design of LED freeform optical system for road lighting with high luminance/illuminance ratio. , 2010, Optics express.

[135]  Wolfgang Knapp,et al.  Improvements and experimental validation of a 3D-probing system for micro-components , 2012 .

[136]  Yue Peng,et al.  Data filtering of optical freeform measurement based on a modified 2D cascaded approximating spline filter , 2012, Other Conferences.

[137]  Mmpa Marc Vermeulen,et al.  Design for precision : current status and trends , 1998 .

[138]  Paolo Spanò Free-forms optics into astronomical use: the case of an all-mirror anamorphic collimator , 2008, Astronomical Telescopes + Instrumentation.

[139]  Ralf D. Geckeler,et al.  Optimized use and calibration of autocollimators in deflectometry , 2007, SPIE Optical Engineering + Applications.

[140]  E. B. Magrab,et al.  Design and testing of a fast tool servo for diamond turning , 1985 .

[141]  J. S. Schruben,et al.  Formulation of a Reflector-Design Problem for a Lighting Fixture , 1972 .

[142]  Walter Michaeli,et al.  Geometrical Accuracy and Optical Performance of Injection Moulded and Injection-compression Moulded Plastic Parts , 2007 .

[143]  Peter Dannberg,et al.  Polymer UV-molding for micro-optical systems and O/E-integration , 2000, SPIE MOEMS-MEMS.

[144]  A. Mallock VI. The action of cutting tools , 1882, Proceedings of the Royal Society of London.

[145]  A. Weckenmann,et al.  Automatic registration method for hybrid optical coordinate measuring technology , 2011 .

[146]  Christopher J. Evans Certification, self-calibration, and uncertainty in testing optical flats , 2010, International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT).

[147]  Frank Wippermann,et al.  Micro-optical artificial compound eyes. , 2006 .

[148]  Xu Liu,et al.  Freeform LED lens for uniform illumination. , 2008, Optics express.

[149]  D. Malacara Optical Shop Testing , 1978 .

[150]  Paul I. Ro,et al.  Magnetic servo levitation by sliding-mode control of nonaffine systems with algebraic input invertibility , 2005, IEEE Transactions on Industrial Electronics.

[151]  F. Fang,et al.  Ultra-precision machining of sinusoidal surfaces using the cylindrical coordinate method , 2009 .

[152]  David Montgomery,et al.  Opto-mechanical design of SCUBA-2 , 2006, SPIE Astronomical Telescopes + Instrumentation.

[153]  Yoshikazu Arai,et al.  A spiral scanning probe system for micro-aspheric surface profile measurement , 2010 .

[154]  Wei-Yao Hsu,et al.  Design and Fabrication of Free-form Shaped Lens for Laser Leveler Instrument , 2010 .

[155]  Martin G. Schinker,et al.  Subsurface damage mechanisms at high-speed ductile machining of optical glasses☆ , 1991 .

[156]  Stefan Bäumer Handbook of plastic optics , 2005 .

[157]  Julio Chaves,et al.  Simultaneous multiple surface optical design method in three dimensions , 2004 .

[158]  Ian J. Saunders,et al.  Fabrication and metrology of freeform aluminum mirrors for the SCUBA-2 instrument , 2005, SPIE Optics + Photonics.

[159]  Kenneth Kubala,et al.  Reducing complexity in computational imaging systems. , 2003, Optics express.

[160]  Guipeng Tie,et al.  Fabrication of off-axis aspheric surfaces using a slow tool servo , 2011 .

[161]  Jiwang Yan,et al.  Fundamental investigation of subsurface damage in single crystalline silicon caused by diamond machining , 2009 .

[162]  C. Gerber,et al.  Surface Studies by Scanning Tunneling Microscopy , 1982 .

[163]  Jiwang Yan,et al.  Fabricating micro-structured surface by using single-crystalline diamond endmill , 2010 .

[164]  Fengzhou Fang,et al.  On minimum exit-burr in micro cutting , 2004 .

[165]  David J. Whitehouse,et al.  Technological shifts in surface metrology , 2012 .

[166]  J. C. Miñano,et al.  High-order aspherics: the SMS nonimaging design method applied to imaging optics , 2008, Optical Systems Design.

[167]  Suet To,et al.  Measuring optical freeform surfaces using a coupled reference data method , 2007 .

[168]  Hugo Thienpont,et al.  Two-dimensional plastic microlens arrays by deep lithography with protons: fabrication and characterization , 2002 .

[169]  B. Gurumoorthy,et al.  Automated inspection of aircraft parts using a modified ICP algorithm , 2010 .

[170]  David G. Pelka,et al.  Free-form illumination lenses designed by a pseudo-rectangular lawnmower algorithm , 2006, SPIE Optics + Photonics.

[171]  Tino Hausotte,et al.  Tactile 3D microprobe system with exchangeable styli , 2011 .

[172]  J M Gordon,et al.  Tailored edge-ray designs for illumination with tubular sources. , 1996, Applied optics.

[173]  Vladimir Oliker Freeform optical systems with prescribed irradiance properties in near-field , 2006, International Optical Design Conference.

[174]  Liu Xu,et al.  Freeform surface lens design for uniform?illumination , 2008 .

[175]  Martin G. Schinker,et al.  Brittle Fracture Mechanisms In Single Point Glass Abrasion , 1987, Other Conferences.

[176]  Paul Morantz,et al.  Precision engineering for astronomy and gravity science , 2010 .

[177]  E. Shen,et al.  High precision target tracking with a compound-eye image sensor , 2004, Canadian Conference on Electrical and Computer Engineering 2004 (IEEE Cat. No.04CH37513).

[178]  A. Yi,et al.  Design and fabrication of a freeform microlens array for uniform beam shaping , 2011 .

[179]  Shinsuke Kawai,et al.  Technology development of mold fabrication for free-form surface, DOE, and microlens , 2006, SPIE MOEMS-MEMS.

[180]  Vladimir Oliker,et al.  Optical design of freeform two-mirror beam-shaping systems. , 2007, Journal of the Optical Society of America. A, Optics, image science, and vision.

[181]  Xu Liu,et al.  Freeform lens arrays for off-axis illumination in an optical lithography system. , 2011, Applied optics.

[182]  Juan C. Miñano,et al.  Free-form optics for illumination , 2009 .

[183]  Yusuke Ogura,et al.  Three-Dimensional Information Acquisition Using a Compound Imaging System , 2007 .

[184]  E. Brinksmeier,et al.  Submicron functional surfaces generated by diamond machining , 2010 .

[185]  Christopher J. Evans,et al.  Uncertainty evaluation for measurements of peak-to-valley surface form errors , 2008 .

[186]  Jannick P. Rolland,et al.  Application of radial basis functions to shape description in a dual-element off-axis eyewear display: Field-of-view limit , 2008 .

[187]  Werner P. O. Juptner,et al.  High-resolution 3D shape measurement on specular surfaces by fringe reflection , 2004, SPIE Photonics Europe.

[188]  William A. Parkyn Design of illumination lenses via extrinsic differential geometry , 1998, Optics & Photonics.

[189]  Tino Hausotte,et al.  New applications of the nanopositioning and nanomeasuring machine by using advanced tactile and non-tactile probes , 2007 .

[190]  William T. Plummer Free-form optical components in some early commercial products , 2005, SPIE Optics + Photonics.

[191]  Michael V. Swain,et al.  In situ electrical characterization of phase transformations in Si during indentation , 2003 .

[192]  Samuel K. Barber,et al.  Sub-microradian surface slope metrology with the ALS Developmental Long Trace Profiler , 2009 .

[193]  M. Steinbuch,et al.  Development and performance demonstration of the NANOMEFOS non-contact measurement machine for freeform optics , 2011 .

[194]  Robert J. Hocken,et al.  Self-Calibration: Reversal, Redundancy, Error Separation, and ‘Absolute Testing’ , 1996 .

[195]  William A. Parkyn,et al.  Converging TIR lens for nonimaging concentration of light from compact incoherent sources , 1993, Optics & Photonics.

[196]  Xiaodong Zhang,et al.  Machining of optical freeform prisms by rotating tools turning , 2012 .

[197]  Raymond G. Ohl,et al.  Highlights of the ASPE 2004 Winter Topical Meeting on Free-Form Optics: Design, Fabrication, Metrology, Assembly , 2004, SPIE Astronomical Telescopes + Instrumentation.

[198]  Liam Blunt,et al.  Paradigm shifts in surface metrology. Part II. The current shift , 2007, Proceedings of the Royal Society A: Mathematical, Physical and Engineering Sciences.

[199]  Christian Brecher,et al.  NURBS Based Ultra-Precision Free-Form Machining , 2006 .

[200]  Ekkard Brinksmeier,et al.  Ultra-precision grinding , 2010 .

[201]  Lei Li,et al.  Design and fabrication of a freeform microlens array for a compact large-field-of-view compound-eye camera. , 2012, Applied optics.

[202]  A Y Yi,et al.  Design and fabrication of a microlens array by use of a slow tool servo. , 2005, Optics letters.

[203]  Yoshimi Takeuchi,et al.  Creation of V-shaped microgrooves with flat-ends by 6-axis control ultraprecision machining , 2010 .

[204]  Gregg E. Davis,et al.  Comparison of Linear Z-Axis and Rotational B-Axis Freeform Diamond Turning , 2010 .

[205]  Kuang-Chao Fan,et al.  Development of a low-cost micro-CMM for 3D micro/nano measurements , 2006 .

[206]  Rainer Tutsch,et al.  Tactile–optical probes for three-dimensional microparts , 2012 .

[207]  Ekkard Brinksmeier,et al.  Manufacturing of molds for replication of micro cube corner retroreflectors , 2008, Prod. Eng..

[208]  W. Cathey,et al.  Phase plate to extend the depth of field of incoherent hybrid imaging systems. , 2004, Applied optics.