VUV-induced dissociation of methylchlorosilanes, studied by electron–ion coincidence spectroscopy

Fragmentation patterns of gas-phase trimethylchlorosilane and methyltrichlorosilane molecules were investigated using the electron-energy-resolved photoelectron–photoion coincidence technique. The production of parent ions and the dominant fragments by 30 eV synchrotron radiation was followed as a function of the photoelectron binding energy. Ion appearance energies were determined from these coincident ion yield curves. The fragmentation patterns and their development are discussed in terms of available internal excess energy as well as the molecular orbital character of the parent molecules. A common dissociation scenario is proposed for both molecules, producing methyl- and chlorine-loss fragments at lower excess energies and smaller fragments through second-step processes at sufficiently high energies.

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