Gas Sensor Devices based on CuO- and ZnO- Nanowires directly synthesized on silicon substrate

In-situ grown CuO and ZnO nanowire (NW) arrays were evaluated for their gas sensing performance. The metal structures were fabricated by standard e-beam lithography, thermal evaporation and lift-off process onto a silicon substrate with gold electrodes. After integration onto a test structure with resistive heater and thermocouple for temperature control, the samples were thermally oxidized at 400°C. During thermal oxidation, nanowires were grown between the oxidized metal structures. The gas sensing performance of the NW array was tested for carbon monoxide, - and a hydrocarbon-mixture (acetylene, ethane, ethene, and propene) at three relative humidity levels.

[1]  L. Luo,et al.  One-dimensional CuO nanowire: synthesis, electrical, and optoelectronic devices application , 2014, Nanoscale Research Letters.

[2]  S. Steinhauer,et al.  Metal Oxide Nanowires for Gas Sensor Applications , 2014, BHM Berg- und Hüttenmännische Monatshefte.

[3]  Thomas Maier,et al.  Gas Sensing Properties of Novel CuO Nanowire Devices , 2013 .

[4]  Rafiq Ahmad,et al.  Gas sensing properties of single crystalline ZnO nanowires grown by thermal evaporation technique , 2013 .

[5]  Yongcai Zhang,et al.  Solvothermal synthesis of Cu-doped ZnO nanowires with visible light-driven photocatalytic activity , 2011 .

[6]  R. Wu,et al.  Conductometric chemical sensor based on individual CuO nanowires , 2010, Nanotechnology.

[7]  In-Sung Hwang,et al.  CuO nanowire gas sensors for air quality control in automotive cabin , 2008 .

[8]  Thomas Maier,et al.  Ultrathin SnO2 gas sensors fabricated by spray pyrolysis for the detection of humidity and carbon monoxide , 2008 .

[9]  I-Cherng Chen,et al.  Highly sensitive ZnO nanowire CO sensors with the adsorption of Au nanoparticles , 2008, Nanotechnology.

[10]  S. Desai,et al.  Gas sensing behaviour of mat-like networked tungsten oxide nanowire thin films , 2007 .

[11]  Charles A Schmuttenmaer,et al.  Conductivity of ZnO nanowires, nanoparticles, and thin films using time-resolved terahertz spectroscopy. , 2006, The journal of physical chemistry. B.

[12]  Z. Fan,et al.  Zinc oxide nanostructures: synthesis and properties. , 2005, Journal of nanoscience and nanotechnology.

[13]  N. Barsan,et al.  Fundamental and practical aspects in the design of nanoscaled SnO2 gas sensors: a status report , 1999 .

[14]  Uwe Lampe,et al.  Thin-film gas sensors based on semiconducting metal oxides , 1995 .

[15]  G. Urban,et al.  Work Function Based CO2 Gas Sensing Using Metal Oxide Nanoparticles at Room Temperature , 2015 .

[16]  Matteo Ferroni,et al.  Quasi-one dimensional metal oxide semiconductors: Preparation, characterization and application as chemical sensors , 2009 .