Design and fabrication of antireflective surface microstructures on lithium triborate

This work aims to design and fabricate sub-wavelength structures on lithium triborate surface for increasing its transmittance at 1064 nm. The finite-difference time-domain (FDTD) method is used to discuss the effects of subwavelength structure parameters such as period, depth, duty cycle and shape factor on the reflectivity. The subwavelength surface microstructures are fabricated by interference lithography technique and reactive ion beam etching method. The transmittance of the lithium triborate with single-side sub-wavelength structures is measured by UVvisible- near-infrared spectrophotometer. The results show that the transmittance of the sample with single-side microstructures at 1064 nm is about 4% higher than that of the polished substrate.

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