Tuning the resonance frequencies and mode shapes in a large range multi-degree of freedom micromirror.

The ability to actively shift the primary resonance of a 2D scanning micromirror allows the user to set the scanning direction, set the scanning frequency, and lift otherwise degenerate modes in a symmetrically designed system. In most cases, resonant scanning micromirrors require frequency stability in order to perform imaging and projection functions properly. This paper suggests a method to tune the tip and tilt resonant frequencies in real time while actively suppressing or allowing degeneracy of the two modes in a symmetric electrothermal micromirror. We show resonant frequency tuning with a range of degeneracy separation of 470 Hz or by approximately ±15% and controllable coupling.

[1]  Ki-Hun Jeong,et al.  Electrothermal MEMS fiber scanner for optical endomicroscopy. , 2016, Optics express.

[2]  Hao Guo,et al.  Method for Measurement of Multi-Degrees-of-Freedom Motion Parameters Based on Polydimethylsiloxane Cross-Coupling Diffraction Gratings , 2017, Nanoscale Research Letters.

[3]  Xingde Li,et al.  Dynamic focus-tracking MEMS scanning micromirror with low actuation voltages for endoscopic imaging. , 2013, Optics express.

[4]  Maher Kayal,et al.  MEMS based color-VGA micro-projector system , 2010 .

[5]  Seonho Seok,et al.  A study on resonant frequency and Q factor tunings for MEMS vibratory gyroscopes , 2004 .

[6]  Matthias Imboden,et al.  Electrothermally actuated tip-tilt-piston micromirror with integrated varifocal capability. , 2015, Optics express.

[7]  M. O. Freeman,et al.  Scanned Laser Pico-Projectors : Seeing the Big Picture (with a Small Device) , 2009 .

[8]  B. Javidi,et al.  Spatiotemporally multiplexed integral imaging projector for large-scale high-resolution three-dimensional display. , 2004, Optics express.

[9]  Ki-Hun Jeong,et al.  Lissajous fiber scanning for forward viewing optical endomicroscopy using asymmetric stiffness modulation. , 2014, Optics express.

[10]  G S Kino,et al.  Micromachined scanning confocal optical microscope. , 1996, Optics letters.

[11]  Huikai Xie,et al.  Pre-Shaped Open Loop Drive of Electrothermal Micromirror by Continuous and Pulse Width Modulated Waveforms , 2010, IEEE Journal of Quantum Electronics.

[12]  Ethan G. Keeler,et al.  Progress of MEMS Scanning Micromirrors for Optical Bio-Imaging , 2015, Micromachines.

[13]  Li Li,et al.  Design, Simulation, and Characterization of a Bimorph Varifocal Micromirror and Its Application in an Optical Imaging System , 2013, Journal of Microelectromechanical Systems.

[14]  Gary K. Fedder,et al.  Endoscopic optical coherence tomographic imaging with a CMOS-MEMS micromirror $ , 2003 .

[15]  H. Urey,et al.  MEMS Laser Scanners: A Review , 2014, Journal of Microelectromechanical Systems.

[16]  Song Zhang,et al.  Ultrafast 3-D shape measurement with an off-the-shelf DLP projector. , 2010, Optics express.

[17]  Guang Meng,et al.  Tunable Micro- and Nanomechanical Resonators , 2015, Sensors.

[18]  G. Fedder,et al.  Endoscopic optical coherence tomography based on a microelectromechanical mirror. , 2001, Optics letters.

[19]  Chung-De Chen,et al.  A novel two-axis MEMS scanning mirror with a PZT actuator for laser scanning projection. , 2012, Optics express.