Chemicapacitive microsensors for volatile organic compound detection

Abstract A low-cost, low-power volatile organic compound (VOC) sensor has been constructed from an array of micromachined parallel-plate capacitors. The sensor has demonstrated detection of many VOCs well below the lower explosive limits and could be used in industrial leak monitoring applications or for homeland defense. In place of a standard dielectric, the individual capacitors were filled with selectively absorbing polymers. Absorption of a target vapor alters the permittivity of the polymers and thereby changes the capacitance of the elements in the array. A variety of polymers have been used, including polyethylene-co-vinylacetate, which was sensitive to nonpolar hydrocarbons, and siloxanefluoro alcohol, which was highly sensitive to polar VOCs and chemical warfare agent simulants. The response magnitude for each element depends on a combination of different phenomenon such as the dielectric constant of the analyte and polymer swelling. The measured sensitivity of the sensor to most VOCs was found to be in the low parts per million (ppm) range. The response magnitude from one capacitor to the next is reproducible to within 3.2% at 20 °C. The sensor typically responded within a second but frequently required 5–10 min to reach equilibrium. Response times could likely be substantially improved with an optimized capacitor structure that contains a decreased gap between the plates and provisions for more rapid vapor exchange.