Silicon-Filled Rectangular Waveguides and Frequency Scanning Antennas for mm-Wave Integrated Systems

We present a technology for the manufacturing of silicon-filled integrated waveguides enabling the realization of low-loss high-performance millimeter-wave passive components and high gain array antennas, thus facilitating the realization of highly integrated millimeter-wave systems. The proposed technology employs deep reactive-ion-etching (DRIE) techniques with aluminum metallization steps to integrate rectangular waveguides with high geometrical accuracy and continuous metallic side walls. Measurement results of integrated rectangular waveguides are reported exhibiting losses of 0.15 dB/ λg at 105 GHz. Moreover, ultra-wideband coplanar to waveguide transitions with 0.6 dB insertion loss at 105 GHz and return loss better than 15 dB from 80 to 110 GHz are described and characterized. The design, integration and measured performance of a frequency scanning slotted-waveguide array antenna is reported, achieving a measured beam steering capability of 82 ° within a band of 23 GHz and a half-power beam-width (HPBW) of 8.5 ° at 96 GHz. Finally, to showcase the capability of this technology to facilitate low-cost mm-wave system level integration, a frequency modulated continuous wave (FMCW) transmit-receive IC for imaging radar applications is flip-chip mounted directly on the integrated array and experimentally characterized.

[1]  Li Yan,et al.  Simulation and experiment on SIW slot array antennas , 2004 .

[2]  J.C. Batchelor,et al.  Millimeter Wave Substrate Integrated Waveguide Antennas: Design and Fabrication Analysis , 2009, IEEE Transactions on Advanced Packaging.

[3]  Michael H. Francis,et al.  Accurate determination of planar near-field correction parameters for linearly polarized probes , 1988 .

[4]  Z. Popovic,et al.  Micro-Fabricated 130–180 GHz Frequency Scanning Waveguide Arrays , 2012, IEEE Transactions on Antennas and Propagation.

[5]  Constantine A. Balanis,et al.  Antenna Theory: Analysis and Design , 1982 .

[6]  Millimeter-wave integrated waveguides on silicon , 2011, 2011 IEEE 11th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems.

[7]  C. E. Collins,et al.  A new micro-machined millimeter-wave and terahertz snap-together rectangular waveguide technology , 1999 .

[8]  E. Pistono,et al.  High-Performance Shielded Coplanar Waveguides for the Design of CMOS 60-GHz Bandpass Filters , 2012, IEEE Transactions on Electron Devices.

[9]  Kazuo Sato,et al.  Fabrication techniques of convex corners in a (1 0 0)-silicon wafer using bulk micromachining: a review , 2007 .

[10]  M. Spirito,et al.  Silicon integrated waveguide technology for mm-wave frequency scanning array , 2012, 2012 7th European Microwave Integrated Circuit Conference.

[11]  Ke Wu,et al.  Guided-wave and leakage characteristics of substrate integrated waveguide , 2005, IMS 2005.

[12]  Zhi Ning Chen,et al.  140-GHz Planar Broadband LTCC SIW Slot Antenna Array , 2012, IEEE Transactions on Antennas and Propagation.

[13]  Ronald Dekker,et al.  Substrate transfer for RF technologies , 2003 .

[14]  G. Gerini,et al.  Planar circularly symmetric EBG structures for reducing surface waves in printed antennas , 2005, IEEE Transactions on Antennas and Propagation.

[15]  Renato G. Bosisio,et al.  -Band Multiport Substrate-Integrated , 2006 .

[16]  Ke Wu,et al.  Accurate modeling, wave mechanisms, and design considerations of a substrate integrated waveguide , 2006, IEEE Transactions on Microwave Theory and Techniques.

[17]  Akira Ishimaru,et al.  Theory of frequency scanning of antennas , 1962 .

[18]  R. W. Jackson,et al.  Mode conversion at discontinuities in finite-width conductor-backed coplanar waveguide , 1989 .

[19]  L. Le Coq,et al.  SIW Slotted Waveguide Array With Pillbox Transition for Mechanical Beam Scanning , 2012, IEEE Antennas and Wireless Propagation Letters.

[20]  Ke Wu,et al.  Low-loss ultra-wideband transition between conductor-backed coplanar waveguide and substrate integrated waveguide , 2009, 2009 IEEE MTT-S International Microwave Symposium Digest.

[21]  Ke Wu,et al.  Millimeter-wave wideband transition from CPW to substrate integrated waveguide on electrically thick high-permittivity substrates , 2007, 2007 European Microwave Conference.

[22]  M. Spirito,et al.  Silicon Filled Integrated Waveguides , 2010, IEEE Microwave and Wireless Components Letters.

[23]  N. S. Barker,et al.  SU-8 micromachining of millimeter and submillimeter waveguide circuits , 2009, 2009 IEEE MTT-S International Microwave Symposium Digest.

[24]  H. Uchimura,et al.  Development of the "laminated waveguide" , 1998, IMS 1998.

[25]  Xianming Qing,et al.  140-GHz ${\rm TE}_{20}$-Mode Dielectric-Loaded SIW Slot Antenna Array in LTCC , 2013, IEEE Transactions on Antennas and Propagation.

[26]  J. Papapolymerou,et al.  Silicon Micromachined W-Band Folded and Straight Waveguides Using DRIE Technique , 2006, 2006 IEEE MTT-S International Microwave Symposium Digest.

[27]  Nicolaos G. Alexopoulos,et al.  Substrate Optimization for Integrated Circuit Antennas , 1982 .

[28]  Ke Wu,et al.  94 GHz Substrate Integrated Monopulse Antenna Array , 2012, IEEE Transactions on Antennas and Propagation.

[29]  Xin Wang,et al.  A 79-GHz LTCC laminated waveguide to metallic rectangular waveguide transition using high permittivity material , 2010, The 40th European Microwave Conference.

[30]  Ke Wu,et al.  Integrated transition of coplanar to rectangular waveguides , 2001, 2001 IEEE MTT-S International Microwave Sympsoium Digest (Cat. No.01CH37157).

[31]  K. Nagai,et al.  60 GHz flip-chip assembled MIC design considering chip-substrate effect , 1997, 1997 IEEE MTT-S International Microwave Symposium Digest.

[32]  A. C. Newell,et al.  Error analysis techniques for planar near-field measurements , 1988 .

[33]  Peter A. Rizzi,et al.  Microwave Engineering: Passive Circuits , 2008 .

[34]  Hai-Young Lee,et al.  Wideband characterization of a typical bonding wire for microwave and millimeter-wave integrated circuits , 1995 .

[35]  Janusz Grzyb,et al.  Advanced Millimeter-Wave Technologies , 2009 .

[36]  J. Hirokawa,et al.  A slotted post-wall waveguide array with interdigital structure for 45/spl deg/ linear and dual polarization , 2005, IEEE Transactions on Antennas and Propagation.

[37]  Paul V. Brennan,et al.  Preliminary antenna system design for FMCW avalanche radar , 2011, 2011 XXXth URSI General Assembly and Scientific Symposium.

[38]  G. Gerini,et al.  Leaky-Wave Slot Array Antenna Fed by a Dual Reflector System , 2008 .

[39]  R. Elliott.  Antenna Theory and Design , 2003 .

[40]  M. Ando,et al.  A Post-Wall Waveguide Center-Feed Parallel Plate Slot Array Antenna in the Millimeter-Wave Band , 2010, IEEE Transactions on Antennas and Propagation.