Integrated nozzle - flapper valve with piezoelectric actuator and isothermal chamber: a feedback linearization multi control device

This paper introduces a new nozzle-flapper valve with isothermal chamber using piezoelectric actuator. It controls the pressure and flow rate simply, effectively and separately. The proposed valve uses isothermal chamber presenting practical isothermal condition due to its large heat transfer interfaces filled by metal wool. The valve uses stacked type piezoelectric actuator with unique advantages. By using this valve, a simple method has been fulfilled to control flow rate or pressure of ideal gases in a pneumatic actuators. Experimental results demonstrated applications of the proposed valve to control either pressure or flow rate in pneumatic circuits. This valve can be also used in the pilot stage valve to actuate the main stage of a much bigger pneumatic valve. Designated structure contains only one pressure sensor installed on the isothermal control chamber, capable of controlling both pressure and flow rate. The desired output mass flow rate of the valve is controlled by the pressure changes during positioning of piezoelectric actuator at proper position. The proposed valve can control steady and unsteady oscillatory flow rate and pressure effectively, using nonlinear control method such as feedback linearization approach. Its effectiveness is demonstrated and validated through simulation and experiments.