论文信息 - Effects of Al Preflow on the Uniformity of an AlN Nucleation Layer and GaN Grown on Si (111) Substrate - 字舞流文

Effects of Al Preflow on the Uniformity of an AlN Nucleation Layer and GaN Grown on Si (111) Substrate

Q. Feng | Jincheng Zhang | Yue Hao | Tao Zhang | Zhen Bi | Yachao Zhang | Jinbang Ma | Yixin Yao | Yifan Li