Measurement of the Mass Flow and Tangential Momentum Accommodation Coefficient in Silicon Micromachined Channels

Financial support for this work was provided under DARPA contract #J-FB1-92-196 and Marty Schmidt's NSF Presidential Young Investigators award. Additional support for various hardware was provided for by AFOSR under contract #F49620-93-1-0194, monitored by James McMichael. Also, during the writing of this thesis I was supported by Physical Science Incorporated.

[1]  J. Maxwell.  The Scientific Papers of James Clerk Maxwell , 2009 .

[2]  W. PEDDIE,et al.  The Scientific Papers of James Clerk Maxwell , 1927, Nature.

[3]  M. F. Chang,et al.  A Surface Micromachined Miniature Switch For Telecommunications Applications With Signal Frequencies From DC Up To 4 Ghz , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

[4]  C. R. Tilford,et al.  Low-range flowmeters for use with vacuum and leak standards , 1987 .

[5]  Dean R. Chapman,et al.  An analysis of the Burnett equations based on the second law of thermodynamics , 1995 .

[6]  K. L. Sebastian.  Dynamics of Gas-Surface Scattering , 1991 .

[7]  W Steckelmacher,et al.  Knudsen flow 75 years on: the current state of the art for flow of rarefied gases in tubes and systems , 1986 .

[8]  B. Willis,et al.  Calibration Of Microfabricated Shear Stress Sensors , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

[9]  J. Leith Potter.  Gas-Surface Interaction: Investigations on the Interaction of Gases and Well-Defined Solid Surfaces with Respect to Possibilities for Reduction of Aerodynamic Friction and Aerothermal Heating , 1977 .

[10]  A Wolfenden,et al.  Experimentation and Uncertainty Analysis for Engineers , 1991 .

[11]  Lloyd B. Thomas,et al.  Comparative Measurements of Tangential Momentum and Thermal Accommodations on Polished and on Roughened Steel Spheres , 1974 .

[12]  H. Berg,et al.  Compressible laminar flow in a capillary , 1993, Journal of Fluid Mechanics.

[13]  M. K. Andrews,et al.  Damping and gas viscosity measurements using a microstructure , 1995 .

[14]  F. White.  Viscous Fluid Flow , 1974 .

[15]  H. Hosaka,et al.  DAMPING CHARACTERISTICS OF BEAM-SHAPED MICRO-OSCILLATORS , 1995 .

[16]  M. Bergoglio,et al.  Gas flowrate measurements for leak calibration , 1995 .

[17]  S. Timoshenko,et al.  THEORY OF PLATES AND SHELLS , 1959 .

[18]  J. K. Fink.  Tables of thermodynamic and transport properties of UO/sub 2/ , 1982 .

[19]  Hugh W. Coleman,et al.  Experimentation and Uncertainty Analysis for Engineers , 1989 .

[20]  Mitchell J. Novack,et al.  Design and fabrication of a thin film micromachined accelerometer , 1992 .

[21]  R. E. Sonntag,et al.  Introduction to Thermodynamics: Classical and Statistical , 1971 .

[22]  Kenneth S. Breuer,et al.  A Silicon Micromachined Floating-element Shear-stress Sensor With Optical Position Sensing By Photodiodes , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

[23]  Harold Y. Wachman,et al.  Dynamics of Gas-Surface Scattering , 1976 .

[24]  Errol B. Arkili.  Gaseous flow in micron-sized channels , 1994 .

[25]  Edward S. Piekos,et al.  DSMC modeling of micromechanical devices , 1995 .

[26]  Xiaolin Zhong,et al.  On numerical solutions of Burnett equations for hypersonic flow past2-D circular blunt leading edges in continuum transition regime , 1993 .

[27]  Thomas W. Chapman,et al.  Laminar compressible flow in a tube , 1986 .

[28]  M. K. Andrews,et al.  A comparison of squeeze-film theory with measurements on a microstructure , 1993 .

[29]  T. Gabrielson.  Mechanical-thermal noise in micromachined acoustic and vibration sensors , 1993 .