NIS 수직형 프로브 카드의 니들(needle) 저항 측정 시스템에 관한 연구

Needles resistance measuring system of NIS(No initial stress) vertical probe card were developed. The system consist of ADC circuit for measuring the contact resistance, the constant current generator circuit using DAC, pad(or die chip) moving circuit using Z-station, and the interface(LCD, Key, RS232) circuit. The principles of resistance measurement was four-point method. The experiment result was that the constant current circuit by 12bit digital code has the range from 2.58mA to 4.48mA. The moving sensitivity of pad was 2㎛/pulse. We will accomplish the system programming for the ADC and communication in the future.