사출성형을 이용한 미세 패턴 성형의 충진 해석

A plastic substrate with tiny rectangular pillars less than 100㎚ is injection molded to study pattern replication in injection molding. The size of the substrate is 50㎜ × 50㎜ and 1㎜ thick. The substrate has 9 patterned areas of which size is 2㎜ × 2㎜ respectively. The lengths of the pillars are 50㎚, 100㎚, 150㎚ and 200㎚ and the width and height are 50㎚ and about 100㎚ respectively. A pattern master is fabricated by e-beam writing using positive PR(photo resist) and then a nickel stamper replicated from the PR master by nickel electro-plating. Cr is deposited on the PR pattern master before nickel electro-plating as a conducting layer. Using this nickel stamper, several injection molding experiments are done to investigate effects of the injection molding parameters such as mold temperature, injection rate, packing pressure or pattern location on the replication of the patterns under 100㎚.