论文信息 - AlGaAs/GaAs heterojunction bipolar transistors fabricated using a self-aligned dual-lift-off process

AlGaAs/GaAs heterojunction bipolar transistors fabricated using a self-aligned dual-lift-off process

This paper describes a self-aligned heterojunction-bipolar-transistor (HBT) process based on a simple dual-lift-off method. Transistors with emitter width down to 1.2 µm and base doping up to 1 × 1020/cm3have been fabricated. Extrapolated current gain cutoff frequency ftof 55 GHz and maximum frequency of oscillationf_{\max}of 105 GHz have been obtained. Current-mode-logic (CML) ring oscillators with propagation delays as low as 14.2 ps have been demonstrated. These are record performance results for bipolar transistors. The dual-lift-off process is promising for both millimeter-wave devices and large-scale integrated circuit fabrication.

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