A precision three horizontal axis diffractometer system with large crystal stage was developed. It was used for a synchrotron plane wave X-ray topographic camera for a 6 inch Si wafer. A surface sensitive topograph was taken under the condition of specular reflection by (+, +) double crystal arrangement. Change in lattice distortions as small as 0.2 arc second was detected under the condition of plane wave X-ray topography by (+, +, -) triple crystal arrangement.