Strength of silicon containing nanoscale flaws

Silicon is a principal material in submicrometer-scale devices. Components in such devices are subject to intense local stress concentrations from nanoscale contacts during function. Questions arise as to the fundamental nature and extent of any strength-degrading damage incurred at such contacts on otherwise pristine surfaces. Here, a simple bilayer test procedure is adapted to probe the strengths of selected areas of silicon surfaces after nanoindentation with a Berkovich diamond. Analogous tests on silicate glass surfaces are used as a control. The strengths increase with diminishing contact penetration in both materials, even below thresholds for visible cracking at the impression corners. However, the strength levels in the subthreshold region are much lower in the silicon, indicating exceptionally high brittleness and vulnerability to small-scale damage in this material. The results have important implications in the design of devices with silicon components.

[1]  Brian R. Lawn,et al.  Designing damage-resistant brittle-coating structures: II. Trilayers , 2003 .

[2]  M. Swain,et al.  Microstructure evolution in monocrystalline silicon in cyclic microindentations , 2003 .

[3]  B. Lawn,et al.  Role of flaw statistics in contact fracture of brittle coatings , 2001 .

[4]  Y. Meng,et al.  Size effect on the mechanical properties of microfabricated polysilicon thin films , 2001 .

[5]  M. Swain,et al.  Mechanical deformation in silicon by micro-indentation , 2001 .

[6]  B. Lawn,et al.  Contact-induced damage in ceramic coatings on compliant substrates : Fracture mechanics and design , 2001 .

[7]  Y. Isono,et al.  Evaluation of size effect on mechanical properties of single crystal silicon by nanoscale bending test using AFM , 2000, Journal of Microelectromechanical Systems.

[8]  Robert L. Mullen,et al.  Fracture toughness of polysilicon MEMS devices , 2000 .

[9]  Brian R. Lawn,et al.  Fracture modes in brittle coatings with large interlayer modulus mismatch , 1999 .

[10]  M. Matthewson,et al.  Inert strength of subthreshold and post-threshold Vickers indentations on fused silica optical fibres , 1996 .

[11]  B. Lawn Fracture of Brittle Solids by Brian Lawn , 1993 .

[12]  J. Rödel,et al.  Fracture mechanics model for subthreshold indentation flaws , 1991, Journal of Materials Science.

[13]  Bharat Bhushan,et al.  Tribology and Mechanics of Magnetic Storage Devices , 1990 .

[14]  Brian R. Lawn,et al.  Failuer of fused silica fibers with subthreshold flaws , 1988 .

[15]  Robert F. Cook,et al.  The effect of lateral crack growth on the strength of contact flaws in brittle materials , 1986 .

[16]  Brian R. Lawn,et al.  Strength and Fatigue Properties of Optical Glass Fibers Containing Microindentation Flaws , 1985 .

[17]  B. Lawn,et al.  Kinetics of shear-activated indentation crack initiation in soda-lime glass , 1983 .

[18]  B. Lawn,et al.  Mechanics of strength-degrading contact flaws in silicon , 1981 .

[19]  A. Evans,et al.  Elastic/Plastic Indentation Damage in Ceramics: The Median/Radial Crack System , 1980 .

[20]  J. Hagan Shear deformation under pyramidal indentations in soda-lime glass , 1980 .

[21]  Brian R. Lawn,et al.  Flaw Generation by Indentation in Glass Fibers , 1980 .

[22]  B. Lawn,et al.  Residual stress effects in sharp contact cracking , 1979 .

[23]  B. Lawn,et al.  Hardness, Toughness, and Brittleness: An Indentation Analysis , 1979 .

[24]  M. Swain,et al.  The origin of median and lateral cracks around plastic indents in brittle materials , 1978 .

[25]  Michael V. Swain,et al.  Indentation plasticity and the ensuing fracture of glass , 1976 .

[26]  Charles R. Kurkjian,et al.  Strength of inorganic glass , 1985 .