Tunable multichannel optical filter based on silicon photonic band gap materials actuation

A Si-based tunable omnidirectional reflecting photonic band gap structure with a relatively large air gap defect is fabricated and measured. Using only one device, low-voltage tuning around two telecom wavelengths of 1.55 and 1.3 μm by electrostatic force is realized. Four widely spaced resonant modes within the photonic band gap are observed, which is in good agreement with numerical simulations. The whole process is at low temperature and can be compatible with current microelectronics process technology. There are several potential applications of this technology in wavelength division multiplexing devices.

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